Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor

Su, Liyun; Huang, Guanxin; Huang, Rongjin; Zhi-jun, Yang

doi:10.1007/s12206-022-1104-8

J Mech Sci Technol

2022

DOI: 10.1007/s12206-022-1104-8

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Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor

Liyun Su

Guanxin Huang

Rongjin Huang

et al.

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Cited by 3 publications

References 30 publications

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Performance Analysis and Control of a Low-Frequency Vibration Generator for Accelerometer Calibration

Du,

Dang,

Liu

2024

Exp Tech

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Performance Analysis and Control of a Low-Frequency Vibration Generator for Accelerometer Calibration

Du,

Dang,

Liu

2024

Exp Tech

View full text Add to dashboard Cite

Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism

Jiang,

Dong,

Zhang

et al. 2024

Applied Sciences

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In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexible hinge, identified as a critical component of the mechanism. Subsequently, we establish a dynamic model for the entire mechanism. By employing the physical model as a base and combining it with the optimization algorithm, we identify the optimal design parameters for the mechanism. The design achieves a resolution of 50 nrad and meets the specified requirements. The first-order inherent frequency of the mechanism is approximately 43.75 Hz. There is a discrepancy of 2.63% from the finite element modal analysis results and a 3.33% difference from the theoretical analysis results, validating the reliability of the design method proposed in this study.

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Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography

Chen,

Li,

et al. 2023

Electronics

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A macro–micro dual-drive positioning system was developed for Scanning Beam Interference Lithography (SBIL) which uses a dual-frequency laser interferometer as the position reference and exhibits the characteristics of long travel, heavy load, and high accuracy. The macro-motion system adopts a friction-driven structure and a feedforward PID control algorithm, and the stroke can reach 1800 mm. The micro-motion system adopts a flexible hinge–plus-PZT driving method and a PID control algorithm based on neural networks, which achieves sufficient positioning accuracy of this system at the nanometer level. An optical-path-sealing system was used to reduce the measurement noise of the dual-frequency laser interferometer. The static stability of the positioning system, the stepping capacity of the macro-motion system, the stepping capacity of the micro-motion system, and the positioning accuracy of the system were tested and analyzed. Additionally, the sources and effects of errors during the motion process were assessed in detail. Finally, the experimental results show that the workbench can locate at the nanoscale within the full range of travel, which can satisfy the SBIL exposure requirement.

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Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor

Cited by 3 publications

References 30 publications

Performance Analysis and Control of a Low-Frequency Vibration Generator for Accelerometer Calibration

Performance Analysis and Control of a Low-Frequency Vibration Generator for Accelerometer Calibration

Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism

Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography

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