Integrating a Physical Model with Multi-Objective Optimization for the Design of Optical Angle Nano-Positioning Mechanism
Bo Jiang,
Yiming Dong,
Zijie Zhang
et al.
Abstract:In light of recent advancements in synchrotron radiation technology and nano-technology, there has been a marked increase in the need for ultra-precision nano-positioning mechanisms. This paper presents a method that integrates physical models with multi-objective optimization for developing an optical angle nano-positioning mechanism. We begin by examining the actual motion law of the mechanism, based on kinematic principles. The outcomes from this kinematic analysis facilitate a static analysis of the flexib… Show more
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