Design of a calibration machine for optical two-dimensional length standards

Hemming, Björn; Palosuo, Ilkka; Lassila, Antti

doi:10.1117/12.467631

Cited by 5 publications

(8 citation statements)

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“…All interferometers are of the double-pass heterodyne type. The optical setup of the interferometers and movement of the mirror block are similar to the 2D interferometer described in [23]. An upgrade to the setup in [23] is that the optical components of the interferometers are placed on invar structures on an invar plate attached to the granite table.…”

Section: Vtt Mikes Multi-sensor Optical Profilometermentioning

confidence: 99%

Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty

Heikkinen

Nystén

Byman

et al. 2020

Surf. Topogr.: Metrol. Prop.

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Optical measurement of large freeform samples is often limited by the resolution, size and slope limits of measurement devices. This trade-off can be solved using stitching—which, however, creates several difficulties often linked to accuracy of movement of the sample or objective. We present a stitching multisensor freeform topography instrument based on scanning white light interferometer, confocal sensor and accurate movements of the sample tracked using laser interferometers. The interferometers track the sample in 2D at an accuracy of a few nm over a 10 cm × 10 cm area. The instrument is thoroughly characterized and uncertainty is estimated to ensure traceable results. Based on the characterization results the instrument allows topography measurement of freeform sample with 54 nm standard uncertainty for datasets of a few hundred sub-images.

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Section: Vtt Mikes Multi-sensor Optical Profilometermentioning

confidence: 99%

Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty

Heikkinen

Nystén

Byman

et al. 2020

Surf. Topogr.: Metrol. Prop.

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“…Automation in calibration processes offers a great number of advantages as in speed, in accuracy or in decreasing the error rate [1]. Optimization of these processes is a very important task and, in this field, machine vision systems play a fundamental role [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

High accuracy laser based machine vision for calibration of linear encoders and dial instruments

et al. 2010

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A laser interferometer, a vision system, and 1-D precision translation stage are used to develop a high precision measuring station with a working range of 12 mm. The object inspected by the laser-and-vision system is moved using a linear translation stage (LUMINOS INDUSTRIES I1000 -1-Axis Stage) so that the camera can take images of the feature points of the object at two (or more) different positions. Meanwhile, the displacement of the table is measured using a laser interferometer. Putting these two feature points successively in focus the distance between them can be evaluated and adding the displacement measured by the laser interferometer, the real distance between these two feature points is obtained. The developed 1-D laser-and-vision measuring system is used to measure the geometric size (pitch) of grating type linear encoders or industrial line scales. Software counts automatically the number of lines and the laser interferometer produces the corresponding length. For dial instruments the vision machine observes the coincidence of the moving needle with divisions representing (sub) units of length. The displacements measured by laser interferometer are compared with dial indicator and the measuring errors are observed.

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“…Accuracies of optical CMMs reported in the literature range from 0.8 to 6 μm, but their uncertainty for specific tasks is not clearly specified. For measuring the feature width, National Metrology Institutes report uncertainties of 1-2 μm [4][5][6]. Exceptions are the facilities dedicated to photo-mask industry which can achieve uncertainties below 50 nm [7,8].…”

Section: Introductionmentioning

confidence: 99%

Evaluation of an optical coordinate measuring machine for measuring grated structures

Mares¹,

Bergmans²

2012

Meas. Sci. Technol.

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The use of optical coordinate measuring machines (CMMs) in industrial metrology shows great potential due to a high measurement speed and non-contact working principle. However, at present measurements performed by different users present too large variations. The uncertainty contributions are difficult to quantify and standard uncertainty evaluation procedures are needed. In order to address this issue, we have investigated the uncertainty sources of commercial optical CMMs. We present a comparison on chessboard standards between three different vision systems. The influence of critical measurement parameters on image formation and analysis is discussed.

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Design of a calibration machine for optical two-dimensional length standards

Cited by 5 publications

References 0 publications

Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty

Multi-sensor optical profilometer for measurement of large freeforms at nm-level uncertainty

High accuracy laser based machine vision for calibration of linear encoders and dial instruments

Evaluation of an optical coordinate measuring machine for measuring grated structures

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