Design, Manufacturing and characterization of integrated inductors with magnetic layers for DC-DC converter

Abstract

This paper presents the conception, fabrication and characterization of integrated inductors containing magnetic layers. We require different steps of micro-technologies: preparation of glass and ferrite substrates, RF sputtering, photolithography, etching and finally electroplating techniques for copper and gold films. The geometrical magnitudes are determined by using HFSS simulator software. The measurements performed at low and high frequencies (up to 1 GHz) permit to verify the correlation between experiment and simulation results. The inductance of the manufactured spiral inductor is about 200 nH and it is constant from low frequency up to 0.9 GHz.

Current-mode capacitance multiplier with reduced parasitic elements

“…As one has come to expect, not everything can be integrated. For example, only rarely, and using more complex technologies (involving high costs as well), can inductors be integrated [1]. More so, they are limited to relatively low inductance values.…”

Design of an Integrated Inductor with Magnetic Core for Micro-Converter DC-DC Application

“…Several works have been dedicated to inductors integrated with silicon substrates for power conversion [1][2][3][4].…”