Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner

Chu, Hoang Manh; Hane, Kazuhiro

doi:10.1016/j.sna.2010.11.004

Cited by 37 publications

(20 citation statements)

References 30 publications

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“…The large difference of Q values between the slow and fast axes was due to the dependence of damping on the resonant frequency. The Q value increases with the resonant mode and is proportional to f 0.5 according to Chu et al [ 14 ]. As shown in Figure 1 , the slow scanning of the mirror is driven by A and C coils, and the outer frame is scanning together with the mirror plate.…”

Section: Characterization and Resultsmentioning

confidence: 99%

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application

Zhou

Wang

et al. 2017

Micromachines

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Based on microelectronic mechanical system (MEMS) processing, a large-size 2-D scanning mirror (6.5 mm in diameter) driven by electromagnetic force was designed and implemented in this paper. We fabricated the micromirror with a silicon wafer and selectively electroplated Ni film on the back of the mirror. The nickel film was magnetized in the magnetic field produced by external current coils, and created the force to drive the mirror’s angular deflection. This electromagnetically actuated micromirror effectively eliminates the ohmic heat and power loss on the mirror plate, which always occurs in the other types of electromagnetic micromirrors with the coil on the mirror plate. The resonant frequency for the scanning mirror is 674 Hz along the slow axis, and 1870 Hz along the fast axis. Furthermore, the scanning angles could achieve ±4.5° for the slow axis with 13.2 mW power consumption, and ±7.6° for the fast axis with 43.3 mW power consumption. The application of the MEMS mirror to a laser display system effectively reduces the laser speckle. With 2-D scanning of the MEMS mirror, the speckle contrast can be reduced from 18.19% to 4.58%. We demonstrated that the image quality of a laser display system could be greatly improved by the MEMS mirror.

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Section: Characterization and Resultsmentioning

confidence: 99%

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application

Zhou

Wang

et al. 2017

Micromachines

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“…With V-shaped torsion hinges, the slanted vertical comb-drive can also be developed for the design of two-rotational stages. The device can achieve an optical scanning angles of 11.5° and 14° at 12 V with a resonant frequency of 247 Hz [ 37 ].…”

Section: Actuation Principlesmentioning

confidence: 99%

Scanning Micromirror Platform Based on MEMS Technology for Medical Application

et al. 2016

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This topical review discusses recent development and trends on scanning micromirrors for biomedical applications. This also includes a biomedical micro robot for precise manipulations in a limited volume. The characteristics of medical scanning micromirror are explained in general with the fundamental of microelectromechanical systems (MEMS) for fabrication processes. Along with the explanations of mechanism and design, the principle of actuation are provided for general readers. In this review, several testing methodology and examples are described based on many types of actuators, such as, electrothermal actuators, electrostatic actuators, electromagnetic actuators, pneumatic actuators, and shape memory alloy. Moreover, this review provides description of the key fabrication processes and common materials in order to be a basic guideline for selecting micro-actuators. With recent developments on scanning micromirrors, performances of biomedical application are enhanced for higher resolution, high accuracy, and high dexterity. With further developments on integrations and control schemes, MEMS-based scanning micromirrors would be able to achieve a better performance for medical applications due to small size, ease in microfabrication, mass production, high scanning speed, low power consumption, mechanical stable, and integration compatibility.

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“…As for vacuum packaging, it would not change the device’s structure. Additionally, it is effective for decreasing the driving voltage [ 13 ] and promoting the scanning angle and quality factor [ 14 , 15 ]. Therefore, vacuum packaging seems to be an ideal way to enhance the performance of the microscanner.…”

Section: Introductionmentioning

confidence: 99%

“…As stated by the description before, a vacuum-packaged electrostatic microscanner is appropriate for display devices. However, the earlier results showed that the oscillation frequency range has been decreased at high vacuums levels [ 13 , 14 , 15 ], which leads to an instability of the oscillation frequency, especially when temperature varies [ 16 ]. Although many reports agree that a high-level vacuum package will enhance the scanning angle of the microscanner, the narrow frequency range, the difficult sealing technology, and the high cost cannot be ignored.…”

Section: Introductionmentioning

confidence: 99%

The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner

Zhao

Qiao

Song³

et al. 2017

Micromachines

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In order to identify the influence of the vacuum environment on the performance of a comb-drive microscanner, and indicate the optimum pressure for enhancing its performance, a comb-drive microscanner fabricated on silicon-on-insulator (SOI) substrate was prepared and tested at different pressures, and the characteristics in vacuum were obtained. The test results revealed that the vacuum environment enhanced the performance in the optical scanning angle, and decreased the actuation voltage. With a 30 V driving voltage applied, the microscanner can reach an optical scanning angle of 44.3° at a pressure of 500 Pa. To obtain an enhancement in its properties, only a vacuum range from 100 to 1000 Pa is needed, which can be very readily and economically realized and maintained in a vacuum package.

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Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner

Cited by 37 publications

References 30 publications

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application

A Large-Size MEMS Scanning Mirror for Speckle Reduction Application

Scanning Micromirror Platform Based on MEMS Technology for Medical Application

The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner

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