Design, Fabrication, and Testing of an MEMS Microgripper With Dual-Axis Force Sensor

Xu, Qingsong

doi:10.1109/jsen.2015.2453013

Cited by 84 publications

(27 citation statements)

References 25 publications

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“…Xu et al developed a micro-gripper with integrated electrostatic actuator and capacitive force sensor. The feasibility and effectiveness of the gripper device were validated by gripping a human hair 76 μm of diameter [5]. Boudaoud et al fabricated an electrostatic micro-gripper with a nonlinear actuation mechanism while handling calibrated micro glass balls 80 μm of diameter [6].…”

Section: Introductionmentioning

confidence: 99%

A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

et al. 2017

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This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for multi-target micromanipulation. The gripper consists of three fingers assembled on adjustable pedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator, an amplifying structure, and a changeable end effector. The moving trajectories of single and double fingers were calculated and finite element analyses were performed to verify the reliability of the structures. In the gripping experiment, various end effectors of the fingers such as tungsten probes and fibers were tested, and different micro-objects such as glass hollow spheres and iron spheres with diameters ranging from 10 to 800 μm were picked and released. The output resolution is 145 nm/V, and the driven displacement range of the gripper is 43.4 μm. The PZT actuated triple-finger gripper has superior adaptability, high efficiency, and a low cost.

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Section: Introductionmentioning

confidence: 99%

A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

et al. 2017

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“…In addition, CMs can be easily miniaturised, can reduce the number of parts (thereby raising the system reliability) and are free of assembly by a monolithic fabrication. CM-based grippers (compliant gripper) have been successfully used in the applications of precision robotic manipulation, biomedical devices and microelectromechanical systems (MEMS) [5][6][7][8][9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

“…There are mainly two methods to design a compliant gripper: structure optimisation method [12,14,15], and kinematics-based substitution method [5][6][7][8][9][10]13]. The former design approach is to re-consider the design task as an optimal material distribution problem so that the resulting a r c h i v e s o f c i v i l a n d m e c h a n i c a l e n g i n e e r i n g 1 6 ( 2 0 1 6 ) 7 0 8 -7 1 6 a r t i c l e i n f o There are precision issues with traditional rigid-body grippers due to their nature in presence of joints' backlash and friction.…”

Section: Introductionmentioning

confidence: 99%

Design and static testing of a compact distributed-compliance gripper based on flexure motion

Hao

Hand

2016

Archives of Civil and Mechanical Engineering

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“…Moreover, these instruments are bulky, rather expensive, and cannot operate in confined areas and severe conditions. To fulfil the needs of molecular manipulation and biomechanical measurement in the harsh environment of a radiation beam, lowcost and large-scale manufactured micro-electro mechanical systems (MEMS) may be a more appropriate approach 11,12 . In this study, we introduce and fully characterize a MEMS-based device, the Silicon Nanotweezers (SNT) 13 , as an ideal instrument to perform the unprecedented real-time biomechanical detection of the radiation damage of DNA exposed to the ionizing radiation environment of radiotherapy treatment.…”

Section: Introductionmentioning

confidence: 99%

Real-time mechanical characterization of DNA degradation under therapeutic X-rays and its theoretical modeling

et al. 2016

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The killing of tumor cells by ionizing radiation beams in cancer radiotherapy is currently based on a rather empirical understanding of the basic mechanisms and effectiveness of DNA damage by radiation. By contrast, the mechanical behaviour of DNA encompassing sequence sensitivity and elastic transitions to plastic responses is much better understood. A novel approach is proposed here based on a micromechanical Silicon Nanotweezers device. This instrument allows the detailed biomechanical characterization of a DNA bundle exposed to an ionizing radiation beam delivered here by a therapeutic linear particle accelerator (LINAC). The micromechanical device endures the harsh environment of radiation beams and still retains molecular-level detection accuracy. In this study, the first real-time observation of DNA damage by ionizing radiation is demonstrated. The DNA bundle degradation is detected by the micromechanical device as a reduction of the bundle stiffness, and a theoretical model provides an interpretation of the results. These first real-time observations pave the way for both fundamental and clinical studies of DNA degradation mechanisms under ionizing radiation for improved tumor treatment.

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Design, Fabrication, and Testing of an MEMS Microgripper With Dual-Axis Force Sensor

Cited by 84 publications

References 25 publications

A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

A PZT Actuated Triple-Finger Gripper for Multi-Target Micromanipulation

Design and static testing of a compact distributed-compliance gripper based on flexure motion

Real-time mechanical characterization of DNA degradation under therapeutic X-rays and its theoretical modeling

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