2012 International Conference on Indium Phosphide and Related Materials 2012
DOI: 10.1109/iciprm.2012.6403336
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Design, fabrication, and preliminary test results of a new InGaAsP/InP high-Q ring resonator for gyro applications

Abstract: Design, fabrication and initial characterization of large-size InGaAsP/InP ring resonators for gyro applications are reported in this paper. The devices configuration includes a ring with a radius of 13 mm and a straight bus waveguide with tapered ends. Four cavities with the same radius and different values of the bus/ring gap have been fabricated by metal-organic vapour-phase-epitaxy, standard photolithography and reactive ion etching. Characterization results show that the resonator with nominal gap = 1.444… Show more

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Cited by 22 publications
(14 citation statements)
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“…Silica-on-silicon and silicon nitride technologies allow the fabrication of resonators with very low loss [41]- [43], but LiNbO 3 [44], glass [45,46], silicon [47], polymers [48], and InP [49,50] are also used. Along with these fully passive ring resonators, some configurations, including an optical amplifier to compensate losses, have been also proposed and experimented [51,52].…”
Section: Resonant Micro Optical Gyroscopes (Rmogs)mentioning
confidence: 99%
See 1 more Smart Citation
“…Silica-on-silicon and silicon nitride technologies allow the fabrication of resonators with very low loss [41]- [43], but LiNbO 3 [44], glass [45,46], silicon [47], polymers [48], and InP [49,50] are also used. Along with these fully passive ring resonators, some configurations, including an optical amplifier to compensate losses, have been also proposed and experimented [51,52].…”
Section: Resonant Micro Optical Gyroscopes (Rmogs)mentioning
confidence: 99%
“…(4)). As described in [49], a ring resonator with Q ≥ 10 6 and d ≥ 10 mm is necessary to achieve a resolution of δΩ = 10 • /h or less.…”
Section: Inp Based Gyro On a Chipmentioning
confidence: 99%
“…In recent years, other efforts and extensive research has also been undertaken on the accuracy improvement of gyroscopes. One of the competitive technologies is the photonic resonant micro optical gyroscope (RMOG) [5,6,7,8]. Ciminelli and Dell’Olio et al reported on large InGaAsP/InP ring resonators for gyroscope applications in [5], where the device configuration includes a ring and a straight bus waveguide with tapered ends.…”
Section: Introductionmentioning
confidence: 99%
“…One of the competitive technologies is the photonic resonant micro optical gyroscope (RMOG) [5,6,7,8]. Ciminelli and Dell’Olio et al reported on large InGaAsP/InP ring resonators for gyroscope applications in [5], where the device configuration includes a ring and a straight bus waveguide with tapered ends. Furthermore, a large-radius InP resonator with a high Q-factor of 10 6 was designed, fabricated, and characterized for the first time in [6].…”
Section: Introductionmentioning
confidence: 99%
“…The configuration includes a narrow linewidth laser generating the beam coming in the beam splitter (BS), two phase modulators and two acousto-optic frequency shifters for processing both optical beams coming out from the splitter, two photodiodes (D), and an electronic read-out unit [18,19].…”
Section: Sensors Configurationmentioning
confidence: 99%