Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry

Hua, Li; Yun, Hongmei; Du, Xin; Guo, Chaoqun; Zeng, Ruosheng; Jiang, Yongrong; Chen, And Zhencheng

doi:10.3390/mi10050286

Cited by 7 publications

(6 citation statements)

References 29 publications

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“…The ion signal strength calculation equation is as follows 1 :

H = n_{in} italicQexp ()(, - t_{res} \frac{π^{2} D}{{g_{e}}^{2}}) = n_{in} italicQexp ()(, - t_{res} \frac{π^{2} k_{B} italicKT}{q {(g - \frac{2 K V_{H} d}{italicfg})}^{2}})

where

n_{in}

is the concentration of ions at the entrance to the filter zone,

Q

is the flow rate of the carrier gas, and

t_{res}

is the time for ions to pass through the filter zone. D is the diffusion coefficient of ions,

g_{e}

is the effective spacing in the filter zone,

k_{B}

is the Boltzmann constant,

q

is the ion charge number,

g

is the substrate spacing in the filter zone, T is the Kelvin temperature,

V_{H}

is the RF voltage amplitude of the square wave,

d

is the duty ratio, and

f

is the RF voltage frequency of the square wave.…”

Section: Resultsmentioning

confidence: 99%

“…The equation for calculating the peak resolution of Peak 1 is shown in Equation 1 :

R = \frac{CV}{FWHM} = \frac{V_{H} \sqrt{K_{L} (][, 1 + α ()(, E / N))}}{4 (][, 1 + \frac{1}{italicdα ()(, E / N)}) \sqrt{\frac{k_{B} Tln 2}{q t_{italicres}}}}

where

R

is the resolution,

italicCV

is the compensation voltage,

italicFWHM

is the full width at half maximum,

V_{H}

is the square wave RF voltage amplitude,

K_{L}

is the mobility of ions in a low electric field, and

α ()(, E / N)

is the ion mobility coefficient.

d

is the duty cycle and

k_{B}

is the Boltzmann constant.…”

Section: Resultsmentioning

confidence: 99%

“…The mechanism is that the carrier gas carries gaseous chemical substances into the ion source, which ionizes the substances into charged ions. The ionized ions can be separated under high and low electric fields due to their different ion mobilities to detect different substances 1–3 …”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Simultaneously improving the resolving power and sensitivity for planar high‐field asymmetric waveform ion mobility spectrometry using a mixed gas inlet mode at two ends

Zeng

et al. 2021

Rapid Comm Mass Spectrometry

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Rationale Resolution and sensitivity are two key parameters for describing the performance of high‐field asymmetric waveform ion mobility spectrometry (FAIMS). An increase in the resolving power of FAIMS has been realized by adding helium to nitrogen in planar FAIMS, but it comes at the expense of sensitivity. Methods Here, a new hollow needle‐to‐ring discharge device integrated on a PCB substrate is used as the ion source for FAIMS. Helium flows from the hollow part of the hollow needle to improve the ionization effect. Nitrogen carries the sample into the ionization chamber and is mixed with helium as the carrier gas. Results Under a nitrogen flow rate of 1 L min−1, 1.5 L min−1, 2 L min−1, and 2.5 L min−1, adding helium at different flow rates (0.2 L min−1, 0.3 L min−1, 0.5 L min−1, and 1 L min−1) can simultaneously improve the separation ability and sensitivity. Helium and nitrogen with flow rates of 0.2, 0.3, 0.5, and 1 L min−1 were added to nitrogen (2 L min−1). The separation ability and sensitivity of the mixed gases doped with helium are better than those of nitrogen. The larger the RF voltage amplitude is, the more obvious the improvement in the separation ability when helium is added. However, helium doping has the opposite effect on the sensitivity. Conclusions This study provides a new idea and technical means for the application of helium and nitrogen gas mixtures in planar FAIMS. This method can greatly improve the performance of FAIMS.

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“…The ion signal strength calculation equation is as follows 1 :

H = n_{in} italicQexp ()(, - t_{res} \frac{π^{2} D}{{g_{e}}^{2}}) = n_{in} italicQexp ()(, - t_{res} \frac{π^{2} k_{B} italicKT}{q {(g - \frac{2 K V_{H} d}{italicfg})}^{2}})

where

n_{in}

is the concentration of ions at the entrance to the filter zone,

Q

is the flow rate of the carrier gas, and

t_{res}

is the time for ions to pass through the filter zone. D is the diffusion coefficient of ions,

g_{e}

is the effective spacing in the filter zone,

k_{B}

is the Boltzmann constant,

q

is the ion charge number,

g

is the substrate spacing in the filter zone, T is the Kelvin temperature,

V_{H}

is the RF voltage amplitude of the square wave,

d

is the duty ratio, and

f

is the RF voltage frequency of the square wave.…”

Section: Resultsmentioning

confidence: 99%

“…The equation for calculating the peak resolution of Peak 1 is shown in Equation 1 :

R = \frac{CV}{FWHM} = \frac{V_{H} \sqrt{K_{L} (][, 1 + α ()(, E / N))}}{4 (][, 1 + \frac{1}{italicdα ()(, E / N)}) \sqrt{\frac{k_{B} Tln 2}{q t_{italicres}}}}

where

R

is the resolution,

italicCV

is the compensation voltage,

italicFWHM

is the full width at half maximum,

V_{H}

is the square wave RF voltage amplitude,

K_{L}

is the mobility of ions in a low electric field, and

α ()(, E / N)

is the ion mobility coefficient.

d

is the duty cycle and

k_{B}

is the Boltzmann constant.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Simultaneously improving the resolving power and sensitivity for planar high‐field asymmetric waveform ion mobility spectrometry using a mixed gas inlet mode at two ends

Zeng

et al. 2021

Rapid Comm Mass Spectrometry

View full text Add to dashboard Cite

show abstract

“…Mass spectrometry is an important material analysis method nowadays. It has been widely used in many research fields, such as chemical analysis, drug metabolism, clinical medicine, environmental protection, food safety, anti-terrorism, public emergencies, and military technology [ 1 , 2 , 3 , 4 , 5 ]. Although the conventional desktop mass spectrometer has a relatively high technical maturity, it has the disadvantages of large size, high power consumption, and high price, which cannot meet the growing demand.…”

Section: Introductionmentioning

confidence: 99%

A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology

Zhang

Chen

et al. 2021

Micromachines

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With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular ion trap, the relationship between mass resolution and structural parameters of the ion trap array was analyzed by further simulation. The results indicate that, considering the balance of mass resolution and extraction efficiency, the preferable values for the field radius of exit direction y0 and ion exit slot width s0 are 1.61 mm and 200 μm, respectively. Afterwards, a miniature four-channel ion trap array (MFITA) was fabricated, by using MEMS and laser etching technology, and mass spectrometry experiments were carried out to demonstrate its performance. The mass resolution of butyl diacetate with m/z = 230 can reach 324. In addition, the consistency of four channels is verified within the error tolerance, by analyzing air samples. Our work can prove the correctness of the structural design and the feasibility of MEMS preparation for MFITA, which will bring meaningful guidance for its future development and optimization.

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“…Currently, the LIGA technology (German acronym for Lithographie, Galvanoformung, Abformung (Lithography, Electroplating, and Molding)) [23][24][25][26][27][28], has acquired great attention. It is based on a sequence of lithography, electroplating and microforming processes that enable the creation of 3D elements with vertical sides and small lateral dimensions.…”

Section: Introductionmentioning

confidence: 99%

Wideband MOEMS for the Calibration of Optical Readout Systems

Volkov

Luk’yanov

Goryunov

et al. 2021

Sensors

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The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.

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Design, Fabrication and Mass-spectrometric Studies of a Micro Ion Source for High-Field Asymmetric Waveform Ion Mobility Spectrometry

Cited by 7 publications

References 29 publications

Simultaneously improving the resolving power and sensitivity for planar high‐field asymmetric waveform ion mobility spectrometry using a mixed gas inlet mode at two ends

Simultaneously improving the resolving power and sensitivity for planar high‐field asymmetric waveform ion mobility spectrometry using a mixed gas inlet mode at two ends

A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology

Wideband MOEMS for the Calibration of Optical Readout Systems

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