Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

Cao, Huiliang; Liu, Yu; Kou, Zhiwei; Zhang, Yingjie; Shao, Xingling; Gao, Jinyang; Huang, Kun; Shi, Yunbo; Tang, Jun; Shen, Chong; Liu, Jun

doi:10.3390/mi10030186

Cited by 48 publications

(41 citation statements)

References 36 publications

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“…Therefore, the SE is employed to calculate the sequence The signal of gyro is decomposed by IPSO-VMD, IPSO is employed to get the optimal VMD parameters k and α. First, initialize the parameters of IPSO: the range of variable k is [2,12], the range of variable α is [10000,20000], the population of particles is 50, the maximum number of iterations is 30, and the inertia weight is 0.8, the learning factor one and two are all 1, check whether the optimal individual becomes better every eight cycles and particle replacement probability is 0.5. PE is used as the fitness function.…”

Section: Experiments Results and Analysismentioning

confidence: 99%

“…The MEMS gyroscope based on Coriolis acceleration mainly conveys vibration between the drive mode and the detection mode [1,2], due to its advantages such as robustness, low noise, and low power consumption [3], MEMS technology and gyroscopes have been widely used in aviation, aerospace, measuring and other important fields [4][5][6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

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A Temperature Error Parallel Processing Model for MEMS Gyroscope based on a Novel Fusion Algorithm

Cao

Shen

2020

Electronics

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To deal with the influence of temperature drift for a Micro-Electro-Mechanical System (MEMS) gyroscope, this paper proposes a new temperature error parallel processing method based on a novel fusion algorithm. Firstly, immune based particle swarm optimization (IPSO) is employed for optimal parameters search for Variational Modal Decomposition (VMD). Then, we can get the optimal decomposition parameters, wherein permutation entropy (PE) is employed as the fitness function of the particles. Then, the improved VMD is performed on the output signal of the gyro to obtain intrinsic mode functions (IMFs). After judging by sample entropy (SE), the IMFs are divided into three categories: noise term, mixed term and feature term, which are processed differently. Filter the mixed term and compensate the feature term at the same time. Finally, reconstruct them and get the result. Compared with other optimization algorithms, IPSO has a stronger global search ability and faster convergence speed. After Back propagation neural network (BP) is enhanced by Adaptive boosting (Adaboost), it becomes a strong learner and a better model, which can approach the real value with higher precision. The experimental result shows that the novel parallel method proposed in this paper can effectively solve the problem of temperature errors.Electronics 2020, 9, 499 2 of 21 circuit design structure to reduce the damping coefficient, which is convenient and economical [15]. Yang et al. adopted a new concept whereby the on-chip temperature compensation of the MEMS gyroscope is realized by the on-chip sensor. In order to make the on-chip temperature of the micro gyroscope well controlled, the newly integrated serpentine micro heater is used to achieve this function [16]. Cui et al. analyzed the working principle of the gyroscope and adopted the vibration compensation of the drive mode, which has a good effect [17]. However, the hardware compensation cost is high and it is too difficult to implement.The second is through software compensation, it includes the removal of noise and temperature compensation. The software compensation method mainly establishes a model for the drift part and the noise part of the MEMS gyroscope to remove noise and compensate drift. For the establishment of the temperature drift model, the reference temperature and the corresponding temperature drift output obtained in advance are used as a set of training set data. The model is established after the learning and training of the algorithm. When the temperature value is input, the model can predict the output value as compensation. There are two main methods. The first one is serial processing, which first uses a filter to perform noise reduction on the signal and then uses a model to eliminate drift. The other one is parallel processing, which refers to extracting and processing noise components and drift components separately. Dominik uses a combination of experiments and numerical values to provide accurate ceramic acceleration at higher temperature [18]. Yang uses a sim...

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Section: Experiments Results and Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Temperature Error Parallel Processing Model for MEMS Gyroscope based on a Novel Fusion Algorithm

Cao

Shen

2020

Electronics

Self Cite

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“…The most common high-performance vibration gyroscopes are based on the energy transfer caused by the Coriolis coupling between a pair of degenerate vibration modes associated with an axisymmetric structure. Common examples include hemispherical shells [2][3][4], rings [5][6][7][8], and disks [9][10][11][12]. The disk resonator gyroscope (DRG) is a kind of high-performance MEMS gyroscope that has attracted much attention in recent years [13,14].…”

Section: Introductionmentioning

confidence: 99%

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

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An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 • /h to 2.8331 • /h, and the Angle Random Walk (ARW) decreases from 1.0208 • / √ h to 0.0524 • / √ h. Compared with the mode mismatch condition, the ARW is improved by 19.48 times.Micromachines 2020, 11, 210 2 of 22 Therefore, the mode-matching technology improves the bias stability and mechanical sensitivity of MEMS gyroscopes by eliminating the frequency split between the driving mode and the sensing mode, which has attracted significant attention from researchers [19][20][21]. Furthermore, some frequency modification techniques are proposed. Laser finishing, ion beam milling, and selective deposition mass loading reduce frequency split [22,23]. However, these methods are often used to change the dynamic characteristics of the sensor permanently, and this type of tuning is inflexible and time-consuming. The tuning control is limited and can only be achieved offline.Electrostatic tuning is usually used for mode-matching, which can provide more flexibility and real-time realization [24][25][26][27][28][29]. The mode-matching process based on phase-locked loop (PLL) takes advantage of the phase delay of 90 • between the quadrature input and output of the sensing mode. This feature is used in [27] to achieve mode-matching and to adjust the tuning voltage using PLL technology. The amplitude-frequency characteristic refers to the maximum amplitude of the quadrature response signal during mode-matching [28]. However, in these methods, the signal from the Coriolis demodulation channel is used to control the frequency tuning voltage. Therefore, the angular velocity can only be measured if the tuning voltage is fixed, and the matching loop is disconnected after mode-matching. Thus, these methods cannot achieve real-time mode-matching. However, in practical applications, the frequency split of the vibratory mode changes with changes in environmental parameters [29]. Therefore, such one-time matching methods a...

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“…Because the gyroscope is an electro-mechanical device, the effect of nonlinearity on gyroscopes is ultimately reflected in the vibration characteristics. It is noteworthy that the quality factor of the drive mode (Q x ) will affect the vibration response's stabilization process [14]; therefore, its influence on nonlinearity will be discussed in this paper.A cubic term of vibration displacement is introduced into the dynamic equation when the gyroscope displays nonlinear characteristics, in which case the drive mode of nonlinear gyroscopes can be modeled as a Duffing oscillator [15]. This so-called Duffing equation is solved via the harmonic balance method in this paper, and the corresponding amplitude response, as well as the phase response, are obtained.…”

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confidence: 99%

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confidence: 99%

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

Han

et al. 2020

Micromachines

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With the miniaturization of micro-electro-mechanical system (MEMS) gyroscopes, it is necessary to study their nonlinearity. The phase-frequency characteristics, which affect the start-up time, are crucial for guaranteeing the gyroscopes’ applicability. Nevertheless, although the amplitude-frequency (A-f) effect, one of the most obvious problems in nonlinearity, has been well studied, the phase response of nonlinear gyroscopes is rarely mentioned. In this work, an elaborate study on the characteristics and locking process of nonlinear MEMS gyroscopes is reported. We solved the dynamic equation using the harmonic balance method and simulated the phase-locked loop (PLL) actuation process with an iterative calculation method. It was shown that there existed an apparent overhanging and multi-valued phenomenon in both the amplitude–frequency and phase–frequency curves of nonlinear gyroscopes. Meanwhile, it was ascertained by our simulations that the locking time of PLL was retarded by the nonlinearity under certain conditions. Moreover, experiments demonstrating the effect of nonlinearity were aggravated by the high quality factor of the drive mode due to the instability of the vibration amplitude. A nonlinear PLL (NPLL) containing an integrator was designed to accelerate the locking process. The results show that the start-up time was reduced by an order of magnitude when the appropriate integral coefficient was used.

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Design, Fabrication and Experiment of Double U-Beam MEMS Vibration Ring Gyroscope

Cited by 48 publications

References 36 publications

A Temperature Error Parallel Processing Model for MEMS Gyroscope based on a Novel Fusion Algorithm

A Temperature Error Parallel Processing Model for MEMS Gyroscope based on a Novel Fusion Algorithm

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

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