2021
DOI: 10.1088/2058-9565/ac07ee
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Design, fabrication and characterization of a micro-fabricated stacked-wafer segmented ion trap with two X-junctions

Abstract: We describe the implementation of a three-dimensional Paul ion trap fabricated from a stack of precision-machined silica glass wafers, which incorporates a pair of junctions for two-dimensional ion transport. The trap has 142 dedicated electrodes which can be used to define multiple potential wells in which strings of ions can be held. By supplying time-varying potentials, this also allows for transport and re-configuration of ion strings. We describe the design, simulation, fabrication and packaging of the tr… Show more

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Cited by 15 publications
(7 citation statements)
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“…For comparison, 3-dimensional (3D) microfabricated ion traps constructed using wafer stacking techniques achieve an alignment accuracy between symmetric electrodes in the order of 10s of micrometers when aligned manually 34 , 35 . Employing precision-machined self-aligning features directly integrated within the wafers 36 , 37 , or semi-automatic bonding processes 38 , have since reduced the alignment imprecision to ≤2.5 μm. The present piezo actuator solution therefore offers a level of alignment accuracy between separate trap modules that is comparable to the level currently reached between electrodes on stacked wafer trap designs.…”
Section: Resultsmentioning
confidence: 99%
“…For comparison, 3-dimensional (3D) microfabricated ion traps constructed using wafer stacking techniques achieve an alignment accuracy between symmetric electrodes in the order of 10s of micrometers when aligned manually 34 , 35 . Employing precision-machined self-aligning features directly integrated within the wafers 36 , 37 , or semi-automatic bonding processes 38 , have since reduced the alignment imprecision to ≤2.5 μm. The present piezo actuator solution therefore offers a level of alignment accuracy between separate trap modules that is comparable to the level currently reached between electrodes on stacked wafer trap designs.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, many early investigations were constrained to a planar electrode geometry, which results in lower trap depth (typically ∼100 meV) and highly asymmetric field lines [28,29], complicating the control of traps and making them more susceptible to ion loss [30,31]. Demonstrations of multi-segment 3D trap electrode structures have been achieved by stacking multiple layers of laser machined or etched material [22,[32][33][34], however the methods used to produce these traps were not compatible with standard semiconductor fabrication. However, these have achieved trap depths above 1 eV which results in long ion storage times [7,35], and have demonstrated higher levels of control in advanced tasks such as junction transport [33] and non-adiabatic ion transport [20,21].…”
Section: Introductionmentioning
confidence: 99%
“…Junction traps have been demonstrated, for instance transportation with 0.05 to 0.1 quanta of average motional excitation per junction traverse has been realized using a three-dimensional trap fabricated from a stack of laser-machined alumina wafers [28,29]. More advanced laser machining technologies [30] have been used to implement a three-dimensional wafer trap with double junctions [31]. However, the complexities in assembling these three-dimensional wafer traps hamper their scalable reproduction.…”
Section: Introductionmentioning
confidence: 99%