Design, fabrication and characterization of thin film resistances for heat flux sensing application

Zribi, Aymen; Barthès, Magali; Bégot, Sylvie; Lanzetta, François; Rauch, Jean; Moutarlier, Virginie

doi:10.1016/j.sna.2016.04.040

Cited by 52 publications

(24 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We observed a decrease down to 200°C, then an increase. This phenomenon was also reported by Schmid and Seidel [10] and Zribi et al [12] on a Pt/Ti and Pt/Cr film respectively. On the other hand, Johnson only reported a decrease in resistivity on a Ni film without sublayer.…”

Section: Characteristics Of the Sensor With Annealingsupporting

confidence: 82%

See 1 more Smart Citation

Influence of low temperature annealing on Nickel RTDs designed for heat flux sensing

Mokadem

Bégot

Lanzetta

et al. 2019

19th International Congress of Metrology (CIM2019)

Self Cite

View full text Add to dashboard Cite

In this paper, we study the influence of annealing on the performance of Resistive Temperature Detectors made from Nickel thin films. The aimed application is heat flux sensing. The substrate is made of Borofloat glass with a Chromium adhesive layer. Several annealing temperatures between 150°C and 300°C are applied to this assembly. The thin films as deposited and after annealing are analyzed through SEM images. The evolution of the resistance and the temperature coefficient of the sensor are discussed. An annealing temperature is selected that ensures the repeatability of measurements.

show abstract

Section: Characteristics Of the Sensor With Annealingsupporting

confidence: 82%

“…The total sensor dimensions are 5 x 5 x 0.5 mm 3 , with a sensing area of 2 x 2 mm 2 . More details on the sensor can be found in previous works where platinum RTDs were used [12]. The properties of the materials used in the sensor are summarized in Table 1.…”

Section: Design and Fabricationmentioning

confidence: 99%

Influence of low temperature annealing on Nickel RTDs designed for heat flux sensing

Mokadem

Bégot

Lanzetta

et al. 2019

19th International Congress of Metrology (CIM2019)

Self Cite

View full text Add to dashboard Cite

show abstract

“…This maximum temperature was then held for 60 min, followed by a free cooling stage to room temperature again. At this annealing temperature, thin films suffered several structural and microstructural changes, such as grain growth, recrystallization and structural refinement, among others [19].…”

Section: Thin Film Preparationmentioning

confidence: 99%

“…When the thin film thickness (d s ) is known by a separate measurement, such as SEM, the thermal diffusivity of the thin film (α s ) can be determined, which characterizes the time-dependent heat distribution in the film, and when the thermal effusivity of the substrate (e b ) is known by separate measurement, the effusivity (e s ) of the thin film can be determined. The thermal effusivity (e = √ kρc) controls the transient surface heating processes, the heat transition at the interface between different materials, and is of fundamental importance for the heat propagation across layer systems [19]. Once the thermal diffusivity and effusivity are known, the thermal conductivity k s = e s √ α s and volume heat capacity (ρc) s = e s / √ α s of the thin film can be calculated, with ρ being the mass density and c the specific heat capacity [24].…”

Section: Thermal Propertiesmentioning

confidence: 99%

Fabrication, Characterization and Implementation of Thermo Resistive TiCu(N,O) Thin Films in a Polymer Injection Mold

Oliveira

Silva

Laranjeira³

et al. 2020

Materials

View full text Add to dashboard Cite

This paper presents the development of metallic thermoresistive thin film, providing an innovative solution to dynamically control the temperature during the injection molding process of polymeric parts. The general idea was to tailor the signal response of the nitrogen- and oxygen-doped titanium-copper thin film (TiCu(N,O))-based transducers, in order to optimize their use in temperature sensor devices. The results reveal that the nitrogen or oxygen doping level has an evident effect on the thermoresistive response of TiCu(N,O) films. The temperature coefficient of resistance values reached 2.29 × 10−2 °C−1, which was almost six times higher than the traditional platinum-based sensors. In order to demonstrate the sensing capabilities of thin films, a proof-of-concept experiment was carried out, integrating the developed TiCu(N,O) films with the best response in an injection steel mold, connected to a data acquisition system. These novel sensor inserts proved to be sensitive to the temperature evolution during the injection process, directly in contact with the polymer melt in the mold, demonstrating their possible use in real operation devices where temperature profiles are a major parameter, such as the injection molding process of polymeric parts.

show abstract

“…In this paper, a Pt RTD was fabricated using microfabrication lithographic methods. Pt RTDs were previously reported in gas [ 28 ] and heat [ 29 ] flow devices. Pt was chosen due to its biocompatibility and linear behavior with temperature variations within the proposed temperature range [ 30 ].…”

Section: Introductionmentioning

confidence: 99%

LED Optrode with Integrated Temperature Sensing for Optogenetics

et al. 2018

View full text Add to dashboard Cite

In optogenetic studies, the brain is exposed to high-power light sources and inadequate power density or exposure time can cause cell damage from overheating (typically temperature increasing of 2 ∘C). In order to overcome overheating issues in optogenetics, this paper presents a neural tool capable of assessing tissue temperature over time, combined with the capability of electrical recording and optical stimulation. A silicon-based 8 mm long probe was manufactured to reach deep neural structures. The final proof-of-concept device comprises a double-sided function: on one side, an optrode with LED-based stimulation and platinum (Pt) recording points; and, on the opposite side, a Pt-based thin-film thermoresistance (RTD) for temperature assessing in the photostimulation site surroundings. Pt thin-films for tissue interface were chosen due to its biocompatibility and thermal linearity. A single-shaft probe is demonstrated for integration in a 3D probe array. A 3D probe array will reduce the distance between the thermal sensor and the heating source. Results show good recording and optical features, with average impedance magnitude of 371 kΩ, at 1 kHz, and optical power of 1.2 mW·mm−2 (at 470 nm), respectively. The manufactured RTD showed resolution of 0.2 ∘C at 37 ∘C (normal body temperature). Overall, the results show a device capable of meeting the requirements of a neural interface for recording/stimulating of neural activity and monitoring temperature profile of the photostimulation site surroundings, which suggests a promising tool for neuroscience research filed.

show abstract

Design, fabrication and characterization of thin film resistances for heat flux sensing application

Cited by 52 publications

References 26 publications

Influence of low temperature annealing on Nickel RTDs designed for heat flux sensing

Influence of low temperature annealing on Nickel RTDs designed for heat flux sensing

Fabrication, Characterization and Implementation of Thermo Resistive TiCu(N,O) Thin Films in a Polymer Injection Mold

LED Optrode with Integrated Temperature Sensing for Optogenetics

Contact Info

Product

Resources

About