Design evaluation of a single-axis precision controlled positioning stage

Buice, E S; Otten, David; Yang, Raymond H.; Smith, Stuart T.; Hocken, Robert J.; Trumper, David L.

doi:10.1016/j.precisioneng.2008.11.001

Cited by 32 publications

(19 citation statements)

References 8 publications

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“…A 0 and A 1 are the initial positions of the 0th-order and the 1st-order diffracted beam spots, respectively. If the distance between A 0 and A 1 is denoted by L, L can be expressed by [14] L ¼ f tan f 1st (1) where f is the focal length of the collimator objective. f 1st is the diffraction angle of the 1st-order diffracted beam, which is given by [15] …”

Section: Principlementioning

confidence: 99%

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A three-axis autocollimator for detection of angular error motions of a precision stage

Gao¹,

Saito²,

Muto³

et al. 2011

CIRP Annals

100

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Section: Principlementioning

confidence: 99%

“…[1]. The role of a precision linear stage is to make precision positioning of an object, such as a machining tool or a measuring probe, along a straight line for accomplishment of a commanded operation of machining or measurement [2].…”

Section: Introductionmentioning

confidence: 99%

A three-axis autocollimator for detection of angular error motions of a precision stage

Gao¹,

Saito²,

Muto³

et al. 2011

CIRP Annals

100

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“…A precision motion system can be implemented using various types of actuators, including piezo, magnetostrictive, microelectromechanical systems (MEMS)-based, and voice coil motor actuators, as well as linear actuators with an air bearing. [1][2][3][4][5] High-precision machining requires a long stoke with nanometer-level accuracy, which can be achieved using a dual servo stage composed of a coarse and fine stage or a linear motor. However, the configuration and operation of these stages are complex if they involve multiple axes.…”

Section: Introductionmentioning

confidence: 99%

Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion

Lee

2015

Review of Scientific Instruments

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This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.

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“…The current nanotechnology requires nano-manipulation stages that can move and position the specimen to various locations and in desired orientations. This motion needs to be in multiple DOFs with long travel ranges at nano-scale resolution [11,12,13]. Flexural mechanisms have recently been used in increasingly many applications and have come under a lot of analysis.…”

Section: Introductionmentioning

confidence: 99%

FEA analysis and experimental investigation of building blocks for flexural mechanism

Patil

Deshmukh²,

Reddy

et al. 2015

2015 International Conference on Nascent Technologies in the Engineering Field (ICNTE)

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Planar XY Flexural Mechanisms have numerous applications in precision motion mechanisms. Flexural mechanisms generate relative motion between fixed support and motion stage using flexibility of material. This type of mechanisms offers frictionless motion, zero backlash and high order of repeatability. Flexural mechanisms consist of motion stage, flexible elements (building blocks) and fixed support. Various researchers developed flexural mechanism using various building blocks; these can be broadly categorized into hinges and planar type. Present paper investigates basic building blocks of planar flexural mechanism such as single cantilever beam, parallelogram flexure and double parallelogram flexure based on various performance parameters such as deformation, stiffness, payload capacity, parasitic error, angular rotation and cross axis coupling error etc. using FEA analysis tool ANSYS. It is observed that Double Parallelogram Flexural Manipulator (DFM) offers better performance, hence experimental setup is developed using DFM. Comparison of different building blocks of flexural mechanism shows DFM offers better performance and is further experimentally validated. Also, FEA analysis of XY Flexural mechanism which uses DFM as building block is presented.

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Design evaluation of a single-axis precision controlled positioning stage

Cited by 32 publications

References 8 publications

A three-axis autocollimator for detection of angular error motions of a precision stage

A three-axis autocollimator for detection of angular error motions of a precision stage

Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion

FEA analysis and experimental investigation of building blocks for flexural mechanism

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