Amorphous thin films of composition
Fe67Co18Si1B14
have been deposited onto glass substrates by KrF excimer laser ablation
operating with 30 ns pulses at a repetition rate of 11 Hz and using a
METGLAS2605CO®
target as a function of the degree of focusing of the beam. We were able to deposit thin
films and to prepare very soft magnetic amorphous thin films with a coercivity of about
400 A m−1.
This level of magnetic softness is appropriate for different technological applications of
amorphous thin films. The de-focused laser deposition regime seems a suitable method for
fabrication of soft thin films and may have additional advantages compared with traditional
in-focus deposition.