2020
DOI: 10.1109/access.2020.3013116
|View full text |Cite
|
Sign up to set email alerts
|

Design and Simulation of Thermo-Optic Phase Shifters With Low Thermal Crosstalk for Dense Photonic Integration

Abstract: We investigate and demonstrate the thermal crosstalk problem in integrated photonic circuits with metal and silicon doped heaters. Further, we illustrate that due to the localized heating effect, integrated doped heaters are out-performed in terms of thermal crosstalk as compared to integrated metal heaters. To mitigate thermal crosstalk and enhance phase tuning efficiency further, a CMOS compatible air-filled trench region is realized between the doped heater and the adjacent element. The performances of thre… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
10
0

Year Published

2021
2021
2023
2023

Publication Types

Select...
6
2

Relationship

0
8

Authors

Journals

citations
Cited by 27 publications
(13 citation statements)
references
References 30 publications
2
10
0
Order By: Relevance
“…Thermal crosstalk is another important performance metrics for dense integration and PIC miniturization. In this work, owing to the thermally isolating cladding, 3.6 % thermal crosstalk is measured at a 13 µm pitch, which is close to best results obtained on Si [28], [43], [44]. The design, simulation, fabrication procedure, and measurement results will be included in the following sections.…”
Section: (B)supporting
confidence: 73%
“…Thermal crosstalk is another important performance metrics for dense integration and PIC miniturization. In this work, owing to the thermally isolating cladding, 3.6 % thermal crosstalk is measured at a 13 µm pitch, which is close to best results obtained on Si [28], [43], [44]. The design, simulation, fabrication procedure, and measurement results will be included in the following sections.…”
Section: (B)supporting
confidence: 73%
“…It can be seen from the orange line that as the distance between an MR pair increases, the amount of phase crosstalk reduces exponentially. Such a trend has also been observed in [24]. To find a balance between tuning power savings while having reduced crosstalk, we perform a sensitivity analysis based on the distance between two adjacent MRs in our architecture.…”
Section: B Tuning Circuit Designsupporting
confidence: 58%
“…Methods including air-gap trench or silicon substrate undercut post-processing, folded waveguide, and multi-pass waveguide have been proposed and demonstrated. A trade-off between the power consumption and the thermal time constant has also been investigated [46,47]. In this paper, we give an overview of the current status of the TOPS based on silicon photonics technologies.…”
Section: Introductionmentioning
confidence: 99%