Ultra-Compact and Efficient Microheaters on a Submicron-Thick InP Membrane

Abstract

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Scaling photonic integrated circuits with InP technology: A perspective

“…A TOM based on an epitaxially grown n-InP heating layer directly on top of the waveguiding layer has recently been realized. 126 Figure 5(a) shows the schematics of such a TOM, which has an ultra-compact footprint of 13.3 × 7.3 μm 2 including the contact pads. The zero-distance placing of the heating element to the highly confined optical mode results in a high energy efficiency of ∼2.2 mW/π and Pπ ⋅ τ of 28.6 mW μs.…”

“…Further improvement to 1 mW/π and 10 μs time constant is possible by reducing the functional volume even more to a single-mode waveguide. 126 Miniaturized modulators can be realized with the membranebased approach. By inserting a thin layer of dielectric in the middle of two electrically biased semiconductor layers, forming a capacitor, [127][128][129][130][131] efficient modulators by carrier accumulation are reported.…”

High density photonic integration on an InP membrane

“…To enable highly efficient tuning of the phase in the waveguides, which is of high demand in integrated optical phased arrays (OPAs), a novel microheater has been proposed and demonstrated on IMOS platform [13]. With only a length of 13μm, a π phase shift can be achieved with high efficiency (2.26 mW/π) and fast response time (11 μs), thanks to the high thermo-optic coefficient of InP and the epitaxially grown conductive layer with low optical loss.…”