2013
DOI: 10.5923/j.materials.20120206.04
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Design and Simulation of MEMS Based Piezoelectric Shear Actuated Beam

Abstract: Now-a-days, there has been growing demand for the development of micro scale devices, due to its less cost, space requirements, high dimensional stability and especially manufacturing time. This paper reports the modeling of MEMS based Piezoelectric shear actuated beam by using COMSOL Multiphysics software of version 4.2a.The dimensions of the model beam is of 100-mm long, 30-mm width, 10-mm thickness. In this paper, we analysed the deflection of beam under different voltages. In the first step, deflection of … Show more

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Cited by 7 publications
(5 citation statements)
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“…69 The differences in catalytic activity and selectivity to cyclohexanone between Pt-Cr/C and Pt-V/C can be ascribed to the degree of metal-metal interaction between the platinum and the alloying element. 19,70 Keane and group members reported that Pd-Yb/SiO 2 , derived from the cyanide bridged lanthanide palladium complex {(DMF) 10 Yb 2 [Pd(CN) 4 ] 3 } ∞ , exhibits a higher phenol conversion and overall yield of cyclohexanone than Pd/SiO 2 . 34 The promotion effect of the Yb is ascribed to electron donation from the strongly electropositive Yb that activates the reactant.…”
Section: Bimetallic Catalystsmentioning
confidence: 99%
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“…69 The differences in catalytic activity and selectivity to cyclohexanone between Pt-Cr/C and Pt-V/C can be ascribed to the degree of metal-metal interaction between the platinum and the alloying element. 19,70 Keane and group members reported that Pd-Yb/SiO 2 , derived from the cyanide bridged lanthanide palladium complex {(DMF) 10 Yb 2 [Pd(CN) 4 ] 3 } ∞ , exhibits a higher phenol conversion and overall yield of cyclohexanone than Pd/SiO 2 . 34 The promotion effect of the Yb is ascribed to electron donation from the strongly electropositive Yb that activates the reactant.…”
Section: Bimetallic Catalystsmentioning
confidence: 99%
“…The authors ascribed this to both the effect of the crystallite size and the promotion effect of alloy ensembles. 19 Chen et al proved a decrease in TOF with increasing the Pd loading over Pd/MgAl-CHT. 50 Velu et al observed that the TOF increases with decreasing the Pd loading and crystallite size of Pd/CeO 2 -MS. 77 Li found that the TOF increases remarkably with the increase of the atomic ratio of La/Pd from 0.05 to 5 over Pd/La x -Al 2 O 3 .…”
Section: Metal Precursorsmentioning
confidence: 99%
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“…Indeed, we find that there is almost the negligible difference in simulation results between the two cases; the use of strain-charge physics generates slightly higher stress values than the stress-charge counterpart, but the overall trend remains the same. In the simulation, the substrate layer (silicon) was fixed and all other layers were allowed to experience volume expansion or contraction depending on the polarity of the gate voltage bias applied 21 23 . Electric potential was applied to the top surface of the BTO layer and its bottom surface was grounded to assume a full voltage drop across the piezoelectric layer (the simulated potential graph across the BTO layer is available in the Supplementary Information).…”
Section: Methodsmentioning
confidence: 99%
“…Noble metals have many applications in catalytic hydrogenation and oxidation reactions . Often an additional component (promoter) is used to improve the catalyst characteristics and to meet the requirements for a given transformation . Promoters can improve the catalyst selectivity, activity and/or stability .…”
Section: Introductionmentioning
confidence: 99%