2010 International Conference on Mechanical and Electrical Technology 2010
DOI: 10.1109/icmet.2010.5598428
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Design and simulation of mechanical behavior of MEMS-based resonant magnetic field sensor with piezoresistive output

Farooq Ahmad
1
,
John Ojur Dennis
2
,
Nor Hisham Hamid
3
et al.
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Cited by 6 publications
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References 9 publications
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Modeling and microfabrication of a CMOS resonator for magnetic field measurement

Ahmad
1
,
Dennis
2
,
Khir
3
et al. 2012
2012 4th International Conference on Intelligent and Advanced Systems (ICIAS2012)
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Modeling and microfabrication of a CMOS resonator for magnetic field measurement

Ahmad
1
,
Dennis
2
,
Khir
3
et al. 2012
2012 4th International Conference on Intelligent and Advanced Systems (ICIAS2012)
2
0
0
0
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Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors

Ahmad
1
,
Dennis
2
,
Khir
3
et al. 2014
2014 5th International Conference on Intelligent and Advanced Systems (ICIAS)
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CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling

Mian
1
,
Dennis
2
,
Khir
3
et al. 2016
2016 6th International Conference on Intelligent and Advanced Systems (ICIAS)
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