Design and realization of a sputter deposition system for the in situ and in operando use in polarized neutron reflectometry experiments: Novel capabilities

Ye, Jingfan; Book, Alexander; Mayr, Sina; Gabold, Henrik; Meng, Fankai; Schäfferer, Helena; Need, Ryan F.; Gilbert, Dustin A.; Saerbeck, Thomas; Stahn, J.; Böni, P.; Kreuzpaintner, Wolfgang

doi:10.1016/j.nima.2020.163710

Cited by 7 publications

(3 citation statements)

References 25 publications

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“…We use direct current (d.c.) magnetron sputtering as described in refs. 46,50 . One of the three 2" sputter guns is loaded with a 6.3mm thick, 99.99% pure Cu sputter target and a second sputter gun is loaded with a 1.4mm thick 99.99% pure Ni target.…”

Section: Methodsmentioning

confidence: 99%

Polarized Phonons Carry Angular Momentum in Ultrafast Demagnetization

Tauchert

Volkov

Ehberger

et al. 2022

The International Conference on Ultrafast Phenomena (UP) 2022

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Section: Methodsmentioning

confidence: 99%

Polarized Phonons Carry Angular Momentum in Ultrafast Demagnetization

Tauchert

Volkov

Ehberger

et al. 2022

The International Conference on Ultrafast Phenomena (UP) 2022

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“…A 45 nm thick Cu seed layer was grown on a 2 cm × 2 cm Si(001) substrate using DC magnetron sputtering in an ultrahigh-vacuum deposition chamber [17,18]. Subsequently, a 7 nm thick Fe thin film was added on the Cu layer in 28 deposition steps with a growth rate of approximately one monolayer of Fe per deposition step.…”

Section: Methodsmentioning

confidence: 99%

Phase Reconstruction of a Cu(001) Seed Layer from $\textit{in situ}$ Polarized Neutron Reflectometry Data using Fe Reference Layers

Book,

Mayr,

Stahn

et al. 2021

Preprint

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The reconstruction of the complex reflection coefficient obtained by in situ Polarized Neutron Reflectometry is presented. Using the reference layer method, with a magnetic Fe layer, the phase information of the underlying Cu(001) seed layer sample structure is successfully retrieved and its scattering length density is calculated and compared with results obtained from traditional fitting. Two different reference layer approaches for retrieving the phase information are compared.

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“…The sputtering system was also redesigned to improve the parameter control. This provides researchers with a highly versatile in situ deposition system, [ 56 ] as shown in Figure 3 . Furthermore, the development of a new control software allows the deposition process to be fully scripted and integrated with the beamline control into an automated measurement and deposition sequence.…”

Section: Recent Experimental Developmentsmentioning

confidence: 99%

Reflectometry with Polarized Neutrons on In Situ Grown Thin Films

Kreuzpaintner

Schmehl

Book

et al. 2021

Physica Status Solidi (b)

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Originating from the demand for obtaining depth‐resolved magnetization profiles from thin films and heterostructures, polarized neutron reflectometry (PNR) has developed into a unique research tool, which also finds application in the analysis of superconducting or soft matter thin films. While certain in situ sample environments such as gas‐loading or humidity cells were quickly realized after PNR first emerged, preparing and growing thin magnetic films directly in the neutron beam could only be realized in recent years. Herein, a dedicated insight is given on the history and development of in situ thin film growth capabilities for PNR, from early pioneering experiments to the present day. The scientific and technological challenges as well as the advances of neutron sources, neutronics, and data treatment that have led to its realization are highlighted together with the unique research opportunities that it provides and recently obtained experimental results.

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Design and realization of a sputter deposition system for the in situ and in operando use in polarized neutron reflectometry experiments: Novel capabilities

Cited by 7 publications

References 25 publications

Polarized Phonons Carry Angular Momentum in Ultrafast Demagnetization

Polarized Phonons Carry Angular Momentum in Ultrafast Demagnetization

Phase Reconstruction of a Cu(001) Seed Layer from $\textit{in situ}$ Polarized Neutron Reflectometry Data using Fe Reference Layers

Reflectometry with Polarized Neutrons on In Situ Grown Thin Films

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