Design and performance of the microdroplet filtering system used in cathodic arc coating deposition

Miernik, Krzysztof; Walkowicz, J.; Bujak, J.

doi:10.1016/s1288-3255(00)01021-2

Cited by 27 publications

(11 citation statements)

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“…It can be observed that the Cr-Si-N coatings are nanocomposite coatings consisted of nano-crystalline particles (black area) embedded in amorphous matrix, which were clearly distinguished from each other by selected area diffraction pattern (SAED). Similar mixture of nanocrystalline and amorphous phases has also been formed for Cr-Si-N [14] and Ti-Si-N [25] coatings deposited by magnetron sputtering. However, in Ref.…”

Section: Resultssupporting

confidence: 52%

“…However, it has emission of micrometer sized droplets of cathode material from the arc spots, commonly referred to as macroparticles. Over the past years, various chamber configurations and deposition techniques have been developed to reduce the number of droplets [13,14]. These include plasma filtering that reduces the number of macroparticles by obstructing the line of sight between the arc source and the substrates and increase the partial pressure of the reactive gas during deposition [15].…”

Section: Introductionmentioning

confidence: 99%

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Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

Zou

Wang

et al. 2009

Journal of Alloys and Compounds

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Section: Resultssupporting

confidence: 52%

Section: Introductionmentioning

confidence: 99%

Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

Zou

Wang

et al. 2009

Journal of Alloys and Compounds

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“…A major drawback of this technique is the emission of micrometer-sized droplets of cathode material from the arc spots [5,6] . Over the past years various chamber configurations and deposition techniques have been developed to reduce the number of droplets [7][8][9] . As an easy and effective macroparticle-reducing method, the large-area rectangular cathodic arc can reduce the droplets by dispersing the power density on larger target area and was used widely to deposit different hard coatings.…”

Section: Introductionmentioning

confidence: 99%

Structure and performance of TiC-containing diamond-like carbon nanocomposite coatings deposited by rectangular cathodic arc ion-plating

Xie

Yin²,

Ding

et al. 2009

J. Wuhan Univ. Technol.-Mat. Sci. Edit.

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TiC-containing diamond-like carbon (TiC-DLC) nanocomposite coatings were deposited by a rectangular cathodic arc ion-plating system using C 2 H 2 as reacting gas. Raman spectroscopy and transmission electron microscopy analysis show that with increasing flow rate of C 2 H 2 , the structure of nanocomposite coatings changes from TiC nanograin-containing to graphite nanograin-containing DLC. The hardness measurements show that the hardness decreases from 28 GPa to 18 GPa with increasing C 2 H 2 flow rate. The scratch test show that a high critical load (>40 N) was obtained and exhibited a good adhesion between the coating and the substrate. Wear experiment shows that the friction coefficient of TiC-DLC nanocomposite coatings decreases with increasing C 2 H 2 . A low friction coefficient of 0.07 was obtained at 480 sccm C 2 H 2 .

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“…For some applications, such as for optical films, this is an unwanted effect. Several filtering systems have been developed to reduce or eliminate the macroparticles from the arc plasma [2]. Presently, the magnetic filtering is a widely used method for removing the macroparticles.…”

Section: Introductionmentioning

confidence: 99%

Study of Linear Magnetic Filters in a Pulsed Copper Vacuum Arc

Giuliani¹,

Grondona²,

Kelly³

2006

AIP Conference Proceedings

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Articles you may be interested inOn the mechanism of operation of a cathode spot cell in a vacuum arc Appl. Phys. Lett. 104, 184101 (2014) Abstract. An experimental study of the plasma jet generated in a pulsed copper vacuum arc with an annular anode and operated with a linear magnetic filter is presented. Two types of filters were employed, one consisting of an insulating duct and the other of a conducting duct, both of them surrounded by an external coil, which generates the axial magnetic field. To improve the ion flux at the filter entrance another auxiliary magnetic field in the cathode region was applied (focusing field). Also, the cathode shape was modified to confine the cathode spot onto the front cathode surface. Operating the arc under vacuum conditions, probe measurements of the ion saturation current and the plasma potential at different axial positions along the ducts and for different filtering magnetic field values are reported. A comparison between both kinds of filters is also presented.

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Design and performance of the microdroplet filtering system used in cathodic arc coating deposition

Cited by 27 publications

References 0 publications

Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

Microstructure and mechanical properties of Cr–Si–N nanocomposite coatings deposited by combined cathodic arc middle frequency magnetron sputtering

Structure and performance of TiC-containing diamond-like carbon nanocomposite coatings deposited by rectangular cathodic arc ion-plating

Study of Linear Magnetic Filters in a Pulsed Copper Vacuum Arc

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