Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor

Chang, Wen-Han; Yang, Lingmeng; Zhu, Zhezheng; Yang, Zhenchuan; Gao, Chengchen

doi:10.3390/s21134337

Cited by 4 publications

(2 citation statements)

References 30 publications

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“…Hence, the key to solving this challenge is appropriate sensor packaging. The casing should be designed so that (a) to minimize the interference with the sensor performance [37,38], (b) to tightly packed not allowing disintegration, and (c) to maximize the surface contact [39], which can vary depending on situations. In this research, four package designs were developed that took into account each viable way the sensor could be held.…”

Section: Sensor Casing Designs For Conformable Packagingmentioning

confidence: 99%

Conformable packaging of a soft pressure sensor for tactile perception

Das

Bhattacharjee

Thiyagarajan

et al. 2023

Flex. Print. Electron.

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Humans can perceive surface properties of an unfamiliar object without relying solely on vision. One way to achieve it is by physically touching the object. This human-inspired tactile perception is a complementary skill for robotic tactile perception. Robot perception depends on the informational quality of the tactile sensor; thus, packaging sensors and integrating them with robots plays a crucial role. In this work, we investigate the influence of conformable packaging designs on soft polydimethylsiloxane (PDMS)-based flexible pressure sensors that work in a variety of surface conditions and load levels. Four different 3D printed packaging designs capable of maintaining sensor trends have been developed. The low detection limits of 0.7 kPa and 0.1 kPa in the piezoresistive and piezocapacitive sensors, respectively, remain unaffacted and a performance variation as low as 30 % is observed. Coefficient of variation and sensitivity studies have also been performed. Limit tests show that the designs can handle large forces ranging from 500 N to more than a 1000 N. Lastly, qualitative study was performed which covered prospective use-case scenarios as well as the advantages and downsides of each sensor casing design. Overall, the findings indicate that each sensor casing is distinct and best suited for tactile perception when interacting with objects, depending on surface properties.

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Section: Sensor Casing Designs For Conformable Packagingmentioning

confidence: 99%

Conformable packaging of a soft pressure sensor for tactile perception

Das

Bhattacharjee

Thiyagarajan

et al. 2023

Flex. Print. Electron.

View full text Add to dashboard Cite

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“…In our previous work [ 27 ], we proposed a compact acoustic particle velocity gradient sensor based on MEMS thermal acoustic particle velocity sensor (TAPVS) [ 29 ] chips. The MEMS TAPVS is a kind of acoustic vector senor that can directly measure the particle velocity of the sound signals [ 13 ].…”

Section: Theoretical Model Of Mixed Mismatchesmentioning

confidence: 99%

Quantitative Analysis Method and Correction Algorithm Based on Directivity Beam Pattern for Mismatches between Sensitive Units of Acoustic Dyadic Sensors

Yang

Zhu

Chen

et al. 2023

Sensors

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Acoustic dyadic sensors (ADSs) are a new type of acoustic sensor with higher directivity than microphones and acoustic vector sensors, which has great application potential in the fields of sound source localization and noise cancellation. However, the high directivity of an ADS is seriously affected by the mismatches between its sensitive units. In this article, (1) a theoretical model of mixed mismatches was established based on the finite-difference approximation model of uniaxial acoustic particle velocity gradient and its ability to reflect the actual mismatches was proven by the comparison of theoretical and experimental directivity beam patterns of an actual ADS based on MEMS thermal particle velocity sensors. (2) Additionally, a quantitative analysis method based on directivity beam pattern was proposed to easily estimate the specific magnitude of the mismatches, which was proven to be useful for the design of ADSs to estimate the magnitudes of different mismatches of an actual ADS. (3) Moreover, a correction algorithm based on the theoretical model of mixed mismatches and quantitative analysis method was successfully demonstrated to correct several groups of simulated and measured beam patterns with mixed mismatches.

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