Design and Modeling of Robust Multi Degree of Freedom Micro Gyroscope with Wide Bandwidth

Saqib, Muhammad Amjad; Saleem, Muhammad Mubasher; Mazhar, Naveed; Awan, Saif Ullah; Ur-Rehman, Masood

doi:10.1109/inmic.2018.8595570

2018 IEEE 21st International Multi-Topic Conference (INMIC) 2018

DOI: 10.1109/inmic.2018.8595570

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Design and Modeling of Robust Multi Degree of Freedom Micro Gyroscope with Wide Bandwidth

Muhammad Amjad Saqib

Muhammad Mubasher Saleem

Naveed Mazhar

et al.

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2020

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“…With the rapid development of MEMS technology, MEMS gyroscopes have been widely used in various applications, including consumer electronics, automobiles, industrial control systems and inertial navigation applications [1][2][3][4] . These applications urgently require MEMS gyroscopes with higher sensitivity, lower noise and larger bandwidth [5][6][7][8][9] . To improve the performance of the MEMS gyroscopes, lots of researches have been done on the weak Coriolis force detection method of the MEMS gyroscopes.…”

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High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

Qin

Zhang

et al. 2020

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Micro-electro-mechanical system (MEMS) gyroscopes have numerous potential applications including guidance, robotics, tactical-grade navigation, and automotive applications fields. The methods with ability of the weak Coriolis force detection are critical for MEMS gyroscopes. In this paper, we presented a design of MEMS gyroscope based on the tunneling magneto-resistance effect with higher detection sensitivity. Of all these designed parameters, the structural, magnetic field, and magneto-resistance sensitivity values reach to 21.6 nm/°/s, 0.0023 Oe/nm, and 29.5 mV/Oe, thus, with total sensitivity of 1.47 mV/°/s. Multi-bridge circuit method is employed to suppress external magnetic interference and avoid the integration error of the TMR devices effectively. The proposed tunneling magneto-resistive micro-gyroscope shows a possibility to make an inertial grade MEMS gyroscope in the future.

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confidence: 99%

High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

Qin

Zhang

et al. 2020

Sci Rep

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Design and Modeling of Robust Multi Degree of Freedom Micro Gyroscope with Wide Bandwidth

Cited by 1 publication

References 27 publications

High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

High-sensitivity tunneling magneto-resistive micro-gyroscope with immunity to external magnetic interference

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