Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique

Ahmad, Farooq; Dennis, John Ojur; Hamid, Nor Hisham; Khir, M. H. Md; Ahmed, A. Y.

doi:10.1109/apccas.2010.5775024

Cited by 8 publications

(2 citation statements)

References 6 publications

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“…When the frequency of the applied drive voltage is equal to the mechanical fundamental frequency of the resonator, motion of the shuttle reach their maximum values (resonance) [7]. As shown in Fig.…”

Section: Structural Configurationmentioning

confidence: 92%

A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing

Ahmad

Dennis

Khir

et al. 2011

AMR

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This paper is about CMOS MEMS resonant magnetic field sensor in which differential electrostatic actuation, capacitive sensing, resonant frequency, quality factor and sensitivity of interdigitated comb resonator is investigated. Information is embedded in the output signal frequency because it is robust against the interference from other sources during transmission. At damping ratio of 0.0001, resonant frequency of the comb resonator is 4.35 kHz with quality factor 5000 and amplitude 18.45 μm. Sensitivity of the device towards external magnetic field is 9.455 mHz/nT which is 10,000 times improved than recently published data.

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Section: Structural Configurationmentioning

confidence: 92%

A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing

Ahmad

Dennis

Khir

et al. 2011

AMR

Self Cite

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“…Tong et al [11] showed that the paddle-type con guration can eliminate internal stress distribution. Ahmad et al [13] designed a paddletype sensor using the COVENTOR software. Other researchers [14,15] investigated a micro-generator consisting of a silicon paddle-type element.…”

Section: Introductionmentioning

confidence: 99%

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

et al. 2017

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Abstract. The present research is devoted to theoretical study of the pull-in performance of double-sided and paddle-type NEMS actuators fabricated from cylindrical nanowire operating in the Casimir regime and in the presence of the centrifugal force. D'Alembert's principle was used to transform the angular velocity into an equivalent static, centrifugal force. Using the couple stress theory, the constitutive equations of the actuators were derived. The equivalent boundary condition technique was applied to obtain the governing equation of the paddle-type actuator. Three distinct approaches, the DuanAdomian Method (DAM), Finite Di erence Method (FDM), and Lumped Parameter Model (LPM), were applied to solve the equation of motion of these two actuators. This study demonstrates the in uence of various parameters, i.e., the Casimir force, geometric characteristics, and the angular speed, on the pull-in performance.

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A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors

et al. 2015

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Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique

Cited by 8 publications

References 6 publications

A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing

A CMOS MEMS Resonant Magnetic Field Sensor with Differential Electrostatic Actuation and Capacitive Sensing

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors

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