Design and Modeling of a Flexible Contact-Mode Piezoresistive Detector for Time-Based Acceleration Sensing

Rajaraman, V.; Hau, B.S.; Rocha, Licinio; French, P.J.; Makinwa, Kofi A. A.

doi:10.1016/j.proeng.2010.09.293

Cited by 4 publications

(2 citation statements)

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“…Other methods have been reported in literature for the time measurement of the pull-in time. In [10], piezoresistive elements placed in flexible stoppers are used to detect when contact occurs, while in [11] hard-electrical-contacts are used in the stoppers. Although capacitive detection is a more complex approach than the two other methods, the shock between the proof mass and the stoppers can be avoided in this case.…”

Section: Accelerometer Operationmentioning

confidence: 99%

Design of a Time-Based Micro-g Accelerometer

et al. 2011

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Closed-loop pull-in time operated devices are a good alternative for high sensitivity accelerometers. This paper proposes the use of time measurement as the transduction mechanism for the realization of a high-precision accelerometer. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external accelerations. The main design challenges for a pull-in time parallel-plate capacitive microelectromechanical system (MEMS) accelerometer are related to the damping and the associated tradeoff between sensitivity and noise is discussed. Parallel-plate MEMS structures designed and fabricated in a 25 m-thick SOI micromachining process (SOIMUMPS) are used to demonstrate the accelerometer time-based approach and experimental results demonstrate a sensitivity of 0.25 s/ g. Index Terms-g accelerometer, squeeze-film damping, pull-in time, microelectromechanical systems (MEMS) design, microsystems.

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Section: Accelerometer Operationmentioning

confidence: 99%

Design of a Time-Based Micro-g Accelerometer

et al. 2011

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“…Rajaraman et al developed a highly sensitive flexible piezoresistive sensor, which can be used to sense vibration with a full scale acceleration range of 2g. 16,17 An acceleration sensor with sensing axis in the plane of a wafer also has been proposed by Partridge et al 18,19 They used a DRIE to form arbitrarily sharp planar flexures with vertical sidewalls. Oblique incidence ion implantation was used to dope the piezoresistors on the sidewalls of the etched structures.…”

Section: Introductionmentioning

confidence: 99%

Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

Zhang

Takagi

et al. 2014

AIP Advances

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Articles you may be interested inUsing a surface piezoresistor diffusion method and front-side only micromachining process, a planar piezoresistive vibration sensor was successfully developed with a simple structure, lower processing cost and fewer packaging difficulties. The vibration sensor had a large sector proof mass attached to a narrow flexure. Optimization of the boron diffusion piezoresistor placed on the edge of the narrow flexure greatly improved the sensitivity. Planar vibration sensors were fabricated and measured in order to analyze the effects of the sensor dimensions on performance, including the values of flexure width and the included angle of the sector. Sensitivities of fabricated planar sensors of 0.09-0.46 mV/V/g were measured up to a test frequency of 60 Hz. The sensor functioned at low voltages (<3 V) and currents (<1 mA) with a high sensitivity and low drift. At low background noise levels, the sensor had performance comparable to a commercial device. C 2014 Author(s)

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A flexible piezoresistive carbon black network in silicone rubber for wide range deformation and strain sensing

Zhu

Wang

Zhu

2018

Journal of Applied Physics

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This work presents the design, fabrication, and measurement of a piezoresistive device with a carbon black (CB) particle network in a highly flexible silicone rubber for large deformation and wide range strain sensing. The piezoresistive composite film was fabricated with a mixture of silicone rubber and CB filler particles. The test results showed that the CB particle network in the silicone rubber strongly affected the resistance of the device during the process of drawing and its recovery. We found that the 50% volume ratio of CB filler particles showed a lower relative resistance than the 33.3% volume ratio of CB filler particles, but with an advantage of good resistance recovery stability and a smaller perturbation error (smaller changed resistance) during the periodic back and forth linear motor test. With both having a 50% volume ratio of CB filler particles and a 33.3% volume ratio of CB filler particles, one can reach up to 200% strain with resistances 18 kΩ and 110 kΩ, respectively. We also found that the relative resistance increased in an approximately linear relationship corresponding to the value of step-increased instantaneous length for the reported device. Moreover, an application test through hand drawing was used to demonstrate the piezoresistive performance of the device, which showed that the reported device was capable of measuring the instantaneous length with large deformation.

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Design and Modeling of a Flexible Contact-Mode Piezoresistive Detector for Time-Based Acceleration Sensing

Cited by 4 publications

References 0 publications

Design of a Time-Based Micro-g Accelerometer

Design of a Time-Based Micro-g Accelerometer

Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range

A flexible piezoresistive carbon black network in silicone rubber for wide range deformation and strain sensing

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