Design and modeling of a ZnO-based MEMS acoustic sensor for aeroacoustic and audio applications

Arya, Dhairya Singh; Prasad, Mahanth; Tripathi, C. C.

doi:10.1109/ispts.2015.7220129

Cited by 5 publications

(4 citation statements)

References 3 publications

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“…In the literature, most of the piezoelectric microphones are either ZnO [31,33,34], AlN [35][36][37], or PZT [38,39] based having targeted consumer applications. Microphones with a wide bandwidth for aeroacoustic applications have been proposed in [23,[40][41][42][43], and their detailed analyses have been performed, and the parameters have been tabulated in Section 2.1.4 of this paper.…”

Section: Technical Analysis and Discussionmentioning

confidence: 99%

Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio frequency range has been presented. Since the microphone membrane is made of a thin film, it has residual stress that degrades the microphone performance. An in-depth detailed review of research articles containing solutions to relieve these stresses has been presented. The comparative analysis of fabrication processes of single- and dual-chip omnidirectional microphones, in which the membranes are made up of single-crystal silicon, polysilicon, and silicon nitride, has been done, and articles containing the improved performance in these two fabrication processes have been explained. This review will serve as a starting guide for new researchers in the field of capacitive MEMS microphones.

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Section: Technical Analysis and Discussionmentioning

confidence: 99%

Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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“…Stray capacitance should not have been confused with the output capacitance (C) that is mentioned in Equation (1). The latter is the output that is measured from the diaphragm and backplate's electrodes.…”

Section: Stray Capacitancementioning

confidence: 99%

“…Ever since the introduction of modern microphone back in the late 19th century, tremendous progress had been made due to its broad and evolving list of applications in consumer [1,2], medical [3,4], and automotive applications [5,6]. Johann Philipp Reis and Alexander Graham Bell are acknowledged as the inventors of the first microphones [7].…”

Section: Introductionmentioning

confidence: 99%

A Review of MEMS Capacitive Microphones

et al. 2020

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This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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“…One of the most common methods to model a resonant sensor is based on LEM (Lumped Element Model) technique, which provides a good approximated way to predict the dynamic behaviour of this device [31] . This model describes a somewhat complex mechanical system in terms of mass-spring-damper elements, which are often referred to as the mechanical equivalent of the R-L-C elements in the electrical domain .…”

Section: Resonant Sensor Modelmentioning

confidence: 99%

Design and Modelling of a Bidirectional Front-End for Resonating Sensors Based on Pseudo Floating Gate Amplifier

2017

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Abstract:In this paper, we characterize and model a bidirectional front-end based on pseudo-floating gate amplifier (PFGA) for actuation and read-out of resonating sensors. The basic idea consists of swapping the power supply of the PFGA in order to change the directionality of the front-end. A detailed description of the system has been discussed in this paper and supported by simulations and measurement results. A prototype has been fabricated using discrete components and tested with a real transducer (Murata MA40S4) and a Butterworth Van Dyke (BvD) load, which has proved to be proved to be a well approximated model for resonant sensors. The bidirectional amplifier has been implemented with the integrated circuit CD4007UB, which is a commercial discrete component containing low leakage MOSFET. The values chosen for the BvD load are R b = 330 Ω, L m = 60 mH, C s = 450 pF, C E = 2.2 nF, which are approximately the same values of the lumped parameters reported in the data-sheet of the real sensor. This transducer is characterized by a nominal resonant frequency of 40 kHz. Measurement results show good fitting with the models developed in this work and the possibility to predict the sensor response by using the BvD load.

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Design and modeling of a ZnO-based MEMS acoustic sensor for aeroacoustic and audio applications

Cited by 5 publications

References 3 publications

Design Approaches of MEMS Microphones for Enhanced Performance

Design Approaches of MEMS Microphones for Enhanced Performance

A Review of MEMS Capacitive Microphones

Design and Modelling of a Bidirectional Front-End for Resonating Sensors Based on Pseudo Floating Gate Amplifier

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