Design and Implementation of 6 × 6 Array Piezoelectric AlN Hydrophone With High Sensitivity

Yang, Tingting; Wang, Qiang; Zhang, Zengxing; Liu, Zhiwei; Zhao, Yunlong; Liu, Yu; Zang, Junbin; Gao, Rui; Cui, Danfeng; Chen, Xue

doi:10.1109/jsen.2021.3118449

Cited by 5 publications

(2 citation statements)

References 42 publications

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“…The receiving sensitivity of this system offers a flat response with a considerable receiving sensitivity of -178 ± 0.5 dB (re: 1V/µPa) over the low frequency range between 10 Hz to 50 kHz, frequency range not suitable for the assessment of biomedical devices acoustic performance. On the other hand, in [15], a 6 x 6 AlN PMUT array was presented even with a slightly better sensitivity, SR of -172.6 dB (re: 1V/µPa) in the low frequency range from 100 Hz to 2 kHz. As final example of hydrophones based on PMUTs, a 9.5 % Scandium-doped AlN array was discussed in [16].…”

Section: Introductionmentioning

confidence: 93%

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

Ledesma,

Uranga,

Barniol

2024

IEEE Sensors J.

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This work presents a minute single chip PMUTs-on-CMOS-based hydrophone with high receiving sensitivities and low noise. The system is based on three different Sc9.5%Al90.5%N PMUTs geometries, (a) square with an 80 m side, (b) rectangular with a dimension of 60 m x 40 m, and (c) annular with an outer diameter of 80 m which allows to carry out acoustic measurements at very close distances from the transducer under test. Each device is monolithically integrated with a CMOS LNA amplifier with a gain of 25 dB. The first hydrophone prototype was validated in water where two commercial hydrophones from ONDA (HGL-0085 and HNC-0200) were used as references. The experimental results give mean receiving sensitivities of -234 dB re 1V/Pa (equivalent to 1.9 V/MPa), -234.6 dB re 1V/Pa (equivalent to 1.86 V/MPa) and -238.3 dB re 1V/Pa (equivalent to 1.22 V/MPa) for (a), (b) and (c), respectively. These results demonstrate the high performance of the presented PMUTs-on-CMOS to be used in a miniaturized hydrophone for characterizing highfrequency ultrasound transducers.

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Section: Introductionmentioning

confidence: 93%

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

Ledesma,

Uranga,

Barniol

2024

IEEE Sensors J.

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“…In next section different energy harvesting method used in underwater scenarios are studied and identified its benefit and limitation. This paper aimed at addressing the limitation of existing energy harvesting system [8] using piezoelectric sensors [9], [10] by introducing a twostage amplification enabled piezoelectric sensors-based energy harvesting system.…”

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confidence: 99%

Development of renewable energy system for low power underwater devices

Salagare¹,

Sudha²,

Karthik³

2023

IJEECS

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Underwater sensor networks (UWSNs) are an emerging field in the research area as they have potential applications starting from pollution monitoring to defense and ocean exploration. Ocean monitoring is of great importance in marine scientific research. However, battery-operated devices utilized in such systems have limited power and maintenance is difficult. So, devices used underwater suffer from many research challenges and energy issues. Apart from all the problems, harvesting energy underwater is the main limiting factor. Nonrenewable energies come from sources that may not be replenished in our lifetime. Hence, it is very much essential to use renewable energy sources. Ocean has an unlimited amount of energy like wind energy, solar power, and tidal energy. Obtaining sufficient energy is sort of difficult since devices are underwater. Researchers are continuously working on it. Water energy is quite environmentally friendly, and it is a sustainable solution for a secure energy system. This paper implements a renewable energy system using piezoelectric (PZT) sensor, which generates sufficient power for lowpower underwater devices by employing two stage amplifier circuits. Experimental outcome shows the proposed energy harvesting system can generate a maximum voltage of 10.6 V and current of 10.1 mA which is sufficient to run low power underwater device.

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MEMS piezoelectric sensor for self-powered devices: A review

Sawane

Prasad

2023

Materials Science in Semiconductor Processing

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Design and Implementation of 6 × 6 Array Piezoelectric AlN Hydrophone With High Sensitivity

Cited by 5 publications

References 42 publications

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

A Single-Chip AlScN PMUTs-on-CMOS Hydrophone

Development of renewable energy system for low power underwater devices

MEMS piezoelectric sensor for self-powered devices: A review

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