MEMS piezoelectric sensor for self-powered devices: A review

Sawane, Mohini; Prasad, Mahanth

doi:10.1016/j.mssp.2023.107324

Cited by 37 publications

(23 citation statements)

References 111 publications

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“…Figure c illustrates the entire electrical generation process and the corresponding electrical output characteristics of SBFNMs during a single pressing and releasing movement . When the device is not exposed to external stimulation, the internal dipoles remain in a “dormant” state (Figure c ①).…”

Section: Resultsmentioning

confidence: 99%

“…Figure 2c illustrates the entire electrical generation process and the corresponding electrical output characteristics of SBFNMs during a single pressing and releasing movement. 47 When the device is not exposed to external stimulation, the internal dipoles remain in a "dormant" state (Figure 2c ①). When the device surface experiences vertical stress (Figure 2c ②), the DPCPC 0.5 -SBFNMs undergo deformation (Figure 2e(i)), subsequently generating dipole orientation in the same direction, generating an internal electric field.…”

Section: T H I S C O N T E N T I S O N L Y L I C E N S E D F O R C O ...mentioning

confidence: 99%

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Improved Energy Harvesting Ability of Single-Layer Binary Fiber Nanocomposite Membrane for Multifunctional Wearable Hybrid Piezoelectric and Triboelectric Nanogenerator and Self-Powered Sensors

Huang,

Zhu,

Peng

et al. 2023

ACS Nano

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While wearable self-powered electronic devices have shown promising improvements, substantial challenges persist in enhancing their electrical output and structural performance. In this work, a working mechanism involving simultaneous piezoelectric and triboelectric conversion within a monolayer-structured membrane is proposed. Single-layer binary fiber nanocomposite membranes (SBFNMs) (PVDF/ CNT X @PAN/CNT X , DPCPC X ) with two distinct interpenetrating nanocomposite fibers were created through co-electrospinning, incorporating multiwalled carbon nanotubes (CNTs) into polyvinylidene fluoride (PVDF) and polyacrylonitrile (PAN), respectively. The resulting membrane demonstrated an exceptional synergistic effect of piezoelectricity and triboelectricity along with a high machine-to-electric conversion capability. The addition of CNTs increased the PVDF β-phase and the PAN planar zigzag conformation. As a result, the DPCPC 0.5 -SBFNMs-based piezoelectric nanogenerator exhibited excellent electrical output (187 V, 8.0 μA, and 1.52 W m −2 ), maintaining an exceptionally high level of output voltage compared with other piezoelectric nanogenerators. It successfully illuminated 50 commercial light-emitting diodes simultaneously. The output voltage of DPCPC 0.5 -SBFNMs was 5.1 and 4.6 times higher than that of PAN or PVDF single-fiber membranes, respectively. Furthermore, the peak voltage of DPCPC 0.5 -SBFNMs exceeded that of co-electrospinning PVDF/CNT 1.0 @PAN (DPCP 1.0 ) and PVDF@PAN/CNT 1.0 (DPPC 1.0 ) by 20 and 10 V, respectively. The piezoelectric sensor made of DPCPC 0.5 -SBFNMs accurately sensed human movement, ranging from tiny to large, and demonstrated utility as an alarm in medical treatment, fire fighting, and monitoring. Endogenous triboelectricity is proposed in SBFNM piezoelectric materials, enhancing electromechanical conversion and electrical output capacity, thereby promising a wide application potential in self-powered wearable electronic devices.

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Section: Resultsmentioning

confidence: 99%

Section: T H I S C O N T E N T I S O N L Y L I C E N S E D F O R C O ...mentioning

confidence: 99%

Improved Energy Harvesting Ability of Single-Layer Binary Fiber Nanocomposite Membrane for Multifunctional Wearable Hybrid Piezoelectric and Triboelectric Nanogenerator and Self-Powered Sensors

Huang,

Zhu,

Peng

et al. 2023

ACS Nano

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“…PZT lms, however, have disadvantages for biosensing applications, such as considerable Pb toxicity, low sound wave velocity, high acoustic attenuation and high energy loss [24,28]. With complementary metal-oxide semiconductor (CMOS) devices, ZnO and AlN lms are compatible [24]. In order to develop digitalized and automated microsystems that are small, simple to use, responsive, accurate, affordable and use less reagent, ZnO and AlN lms are both promising materials [24].…”

Section: Design and Simulationmentioning

confidence: 99%

“…The resonance behavior of the diaphragm is the main factor that determines the Cut-off frequency, which is situated at the upper end of the bandwidth (at f+3dB). Since the phase of the ideal acoustic sensor in the at band region is zero, there is no latency between its input and output [24][25][26].…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Piezoelectric Diaphragm for Self-Powered Acoustic Sensor

Sawane,

Prasad

2023

Preprint

Self Cite

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A self-powered piezoelectric material-based sensor has miniaturization and mass production capabilities. The finite element analysis shows results prior to device fabrication, which discover potential defects in the design, improve sensor performance, and lead to cost-effective fabrication. This study reveals the trade-offs between sensitivity and frequency range of the proposed device and provides an optimized diaphragm design in terms of material choice and dimension. Regardless of the cavity and holes in the silicon substrate, the optimized design is applicable for any piezoelectric square shaped diaphragm-based acoustic sensor. The constraints of the MEMS fabrication technique are considered while selecting a parameter range for the diaphragm. The obtained results from COMSOL Multiphysics with diaphragm area 12.25 mm2, ZnO (2.5 µm), and silicon layer (5 µm) shows a resonance frequency of 39 kHz and sensitivity of 1.17 mV at 1 kHz of frequency, results in higher sensitivity with maximum feasible frequency range for optimized design.

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“…MEMS fabrication processes have enabled miniaturized and high-density electronic circuitry, resulting in devices with improved performance, along with reduced physical size and cost ( 56 ). Micromachined ultrasound transducers (MUTs), such as piezoelectric MUTs (PMUTs) and capacitive MUTs (CMUTs), are an advantageous alternative to traditional bulk ultrasound transducers developed with piezoceramics due to increased sensitivity from their high-density array architecture ( 57 , 58 ).…”

Section: Improvements With Micromachined Ultrasound Transducersmentioning

confidence: 99%

Visualizing tactile feedback: an overview of current technologies with a focus on ultrasound elastography

Kumar,

Kempski Leadingham,

Kerensky

et al. 2023

Front. Med. Technol.

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Tissue elasticity remains an essential biomarker of health and is indicative of irregularities such as tumors or infection. The timely detection of such abnormalities is crucial for the prevention of disease progression and complications that arise from late-stage illnesses. However, at both the bedside and the operating table, there is a distinct lack of tactile feedback for deep-seated tissue. As surgical techniques advance toward remote or minimally invasive options to reduce infection risk and hasten healing time, surgeons lose the ability to manually palpate tissue. Furthermore, palpation of deep structures results in decreased accuracy, with the additional barrier of needing years of experience for adequate confidence of diagnoses. This review delves into the current modalities used to fulfill the clinical need of quantifying physical touch. It covers research efforts involving tactile sensing for remote or minimally invasive surgeries, as well as the potential of ultrasound elastography to further this field with non-invasive real-time imaging of the organ’s biomechanical properties. Elastography monitors tissue response to acoustic or mechanical energy and reconstructs an image representative of the elastic profile in the region of interest. This intuitive visualization of tissue elasticity surpasses the tactile information provided by sensors currently used to augment or supplement manual palpation. Focusing on common ultrasound elastography modalities, we evaluate various sensing mechanisms used for measuring tactile information and describe their emerging use in clinical settings where palpation is insufficient or restricted. With the ongoing advancements in ultrasound technology, particularly the emergence of micromachined ultrasound transducers, these devices hold great potential in facilitating early detection of tissue abnormalities and providing an objective measure of patient health.

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MEMS piezoelectric sensor for self-powered devices: A review

Cited by 37 publications

References 111 publications

Improved Energy Harvesting Ability of Single-Layer Binary Fiber Nanocomposite Membrane for Multifunctional Wearable Hybrid Piezoelectric and Triboelectric Nanogenerator and Self-Powered Sensors

Improved Energy Harvesting Ability of Single-Layer Binary Fiber Nanocomposite Membrane for Multifunctional Wearable Hybrid Piezoelectric and Triboelectric Nanogenerator and Self-Powered Sensors

Design and Optimization of Piezoelectric Diaphragm for Self-Powered Acoustic Sensor

Visualizing tactile feedback: an overview of current technologies with a focus on ultrasound elastography

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