Design and finite element analysis of weighted-stiffness microelectromechanical digital-to-analogue converters

Liu, Qingquan; Huang, Qing‐An

doi:10.1049/el:20010528

Cited by 10 publications

(7 citation statements)

References 1 publication

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“…So the capacitance could not vary proportionally with the driving voltage. For precise control of the capacitance by digital voltages, microelectromechanical digital-to-analog converters (MEMDAC) could be employed to drive the movable electrodes [12].…”

Section: Design Of Laterally Driven Microactuatorsmentioning

confidence: 99%

Laterally driven tunable capacitors fabricated by a surface micromachining process for RF circuits

Liu

2010

2010 Second Pacific-Asia Conference on Circuits, Communications and System

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A laterally driven micro machined tunable capacitor is proposed. As an alternative to the traditional designs using two electrodes, three electrodes are used so that the series resistance could be reduced. This design also offers opportunities in the circuit design, since the DC-bias voltage is not applied on the two ports. To achieve the capacitance on the order of 0.4 pF, the electrodes are periodically arranged to form three groups of arrays. Thermal actuator arrays are employed to drive the movable electrodes. In order to simplify the design and fabrication, a structure using two layers to build the electrodes is provided, where the capacitance varies from 0.05 pF to 0.13 pF.This two-layer capacitor has been fabricated using a polysilicon surface micro machining process potentially compatible with CMOS process.

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Section: Design Of Laterally Driven Microactuatorsmentioning

confidence: 99%

Laterally driven tunable capacitors fabricated by a surface micromachining process for RF circuits

Liu

2010

2010 Second Pacific-Asia Conference on Circuits, Communications and System

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“…Especially, in the measurement of a microelectromechanical digital-to-analog converter (MEMDAC) for precise positioning [4,5], it is important that the displacement on the order of 1-100 nm be detectable.…”

Section: Layout Design and Conclusionmentioning

confidence: 99%

“…Using the aforementioned principle, a capacitance sensor layout shown in Fig. 6 is designed for measuring the displacement of a MEMDAC [4,5]. Further investigation into improving the accuracy is necessary [6].…”

Section: Layout Design and Conclusionmentioning

confidence: 99%

Laterally driven variable capacitor for displacement measurement of microactuators

Liu

Huang

2002

SPIE Proceedings

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As an alternative to the visual observation method used conventionally, a new approach of sensing the displacement of suface-micromachined polysilicon actuators or microactuator arrays by the measurement of capacitance variation of the electrodes is proposed in this paper. Finite element analysis (FEA) is used to provide the relation between the lateral displacement and the capacitance. In the preliminary design, the capacitance variation is on the order of IF. In order to measure the displacement precisely, the electrode arrays are proposed. This method could be useful for testing a variety of laterally driven microactuators and arrays, including MEMDACs.

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“…Liu et al [7] proposed the 4-bit weighted stiffness microelectromechanical digital-to-analog converters which functions like weighted resistor DAC with biasing voltage of 5 V, and it generates error below 0.001 µm and the same authors [1] have proposed a novel 4-bit bimorph-based MEMS DAC which produces out-of-plane deflection with working voltage of 5 V and nonlinear error of 0.5 µm in their previous publication. Ma et al [8] developed an inertial switch using 3-bit MEMS digital-to-analog converter made of a proofmass, six adjusting plates, two latching beams and a set of parylene suspensions that connects the adjusting plate to the proof-mass in which the spring constants of these meandering parylene suspensions are taken as the design variable to generate unique displacement for the given input binary values.…”

Section: Introductionmentioning

confidence: 99%

Design and Simulation of MEMS-Based Digital-to-Analog Converters for In-Plane Actuation

Pandiyan¹,

Uma

Umapathy

2017

Arab J Sci Eng

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A microelectromechanical system-based digitalto-analog converter (MEMS DAC) using a bent beam electrothermal compliant actuator as a single mechanical bit is proposed in this work. Two types of MEMS DAC namely asymmetric and symmetric structures with multi-bent beam actuators in a chevron arrangement are designed, modeled and simulated in MEMS CAD tool CoventorWare. The proposed DACs generate the mechanical displacement at the output from the digital input based on the principle of weighted stiffness which is analogous to an electronic weighted resistor DAC. The DACs are built using a standard SOIMUMPs process, and its coupled electrothermomechanical analysis is carried out to illustrate their performance. The device operates on 5 V which is well suited with conventional CMOS logic and in turn reduces the power consumption of the device. The simulation result shows that symmetric and asymmetric MEMS DACs produce a nonlinear error of 0.5 and 3.5% from its ideal straight line. The nonlinearity error is found to be less in symmetric design due to equal width of bent beam.

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Design and finite element analysis of weighted-stiffness microelectromechanical digital-to-analogue converters

Cited by 10 publications

References 1 publication

Laterally driven tunable capacitors fabricated by a surface micromachining process for RF circuits

Laterally driven tunable capacitors fabricated by a surface micromachining process for RF circuits

Laterally driven variable capacitor for displacement measurement of microactuators

Design and Simulation of MEMS-Based Digital-to-Analog Converters for In-Plane Actuation

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