Abstract:A laterally driven micro machined tunable capacitor is proposed. As an alternative to the traditional designs using two electrodes, three electrodes are used so that the series resistance could be reduced. This design also offers opportunities in the circuit design, since the DC-bias voltage is not applied on the two ports. To achieve the capacitance on the order of 0.4 pF, the electrodes are periodically arranged to form three groups of arrays. Thermal actuator arrays are employed to drive the movable electro… Show more
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