2004
DOI: 10.1049/ip-smt:20040088
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Design and fabrication of the detector technology for SCUBA-2

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Cited by 15 publications
(14 citation statements)
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“…The advan− tages of TES with negative feedback include linearity, band− width, and immunity of the response to changes in external parameters (e.g., the absorbed optical power and the tem− perature of the heat sink). Consequently, these devices are suitable for fabrication of large format horn−coupled and filled arrays required for many new missions offering advantages over semiconducting bolometers [237][238][239]. In practice, the bias voltage V b is chosen so that, for the small optical power P, the TES will be heated to a steep point on the temperature transition.…”
Section: Transition Edge Sensor Bolometersmentioning
confidence: 99%
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“…The advan− tages of TES with negative feedback include linearity, band− width, and immunity of the response to changes in external parameters (e.g., the absorbed optical power and the tem− perature of the heat sink). Consequently, these devices are suitable for fabrication of large format horn−coupled and filled arrays required for many new missions offering advantages over semiconducting bolometers [237][238][239]. In practice, the bias voltage V b is chosen so that, for the small optical power P, the TES will be heated to a steep point on the temperature transition.…”
Section: Transition Edge Sensor Bolometersmentioning
confidence: 99%
“…The most ambitious example of TES bolometer array is that used in the submillimeter camera -submillimetre com− mon−user bolometer array (SCUBA −2) with 10,240 pixels [238,250] μm). The upper surface of this wafer has been previously implanted with phosphorus to match the impedance of free space (377 W/square).…”
Section: Transition Edge Sensor Bolometersmentioning
confidence: 99%
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“…The transition temperature is tuned via the proximity effect by choosing the thicknesses in a molybdenum-copper bi-layer. Thermal isolation of the sensing element is achieved using a silicon nitride membrane [2]. This choice of detector permits an array to be fabricated without assembling pixels individually, and for a multiplexed readout to be used, reducing the wire count to a reasonable level.…”
mentioning
confidence: 99%
“…SCUBA-2 therefore uses an in-focal-plane architecture, in which the multiplexing elements are located beneath each pixel. Indium bump bonds carry electrical signals from each pixel to the multiplexer circuitry beneath as well as providing bonding between the multiplexer [4] and detector [2] wafers. The measurements presented here represent the first tests of a detector array using this construction.…”
mentioning
confidence: 99%