Design and fabrication of SOI technology based MEMS differential capacitive accelerometer structure

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

“…b . Gupta et al also demonstrated an SOI process based capacitive accelerometer, with proof mass area of 1000 μm × 1000 μm and capacitive sensitivity of 1.65 fF/g; Figure h shows the packaged accelerometer . Another SOI process based capacitive accelerometer was reported by Zhang et al, which featured a comb-like structure.…”

Self-Powered Miniaturized Acceleration Sensor Based on Rationally Patterned Electrodes

“…ACCELERATION sensors play a critical role in various fields of industry and science, for example, automotive industry, healthcare monitoring, consumer electronics, and structural monitoring [1]- [4]. The commonly adopted mechanisms include capacitive [5]- [6], piezoresistive [7]- [8], and piezoelectric [9]- [10] mechanisms. However, some of these technologies expose several limitations, for instance, both of capacitive and piezoresistive acceleration sensors struggle to simplify their structures because they have to carry batteries.…”

Evaluation of Residual Stress of C Oriented AlN/Si (111) and Its Impact on Mushroom Shaped Piezoelectric Resonator 

“…Micro-electro-mechanical system (MEMS) based sensors and actuators are used in a wide variety of applications like military, aerospace, industrial, consumer electronics, healthcare, as well as in agriculture and environment monitoring [1][2][3][4][5][6][7][8][9][10]. The devices like pressure sensors, accelerometers, gyroscope, and temperature sensors are the few most sort after MEMS sensors for these applications [8,[11][12][13][14][15]. On the other hand, smart actuation mechanisms like shape-memory effect, electrostatic, magnetic and piezoelectric are intelligently employed to perform the various desired microscopic operation with great precision [7,14,[16][17][18][19][20] Ever since the introduction of the famous mechanical resonator gate transistor reported by Nathan et al [21], micro-resonators are the important building block of many MEMS devices [22][23][24][25][26][27][28][29].…”

“…The devices like pressure sensors, accelerometers, gyroscope, and temperature sensors are the few most sort after MEMS sensors for these applications [8,[11][12][13][14][15]. On the other hand, smart actuation mechanisms like shape-memory effect, electrostatic, magnetic and piezoelectric are intelligently employed to perform the various desired microscopic operation with great precision [7,14,[16][17][18][19][20] Ever since the introduction of the famous mechanical resonator gate transistor reported by Nathan et al [21], micro-resonators are the important building block of many MEMS devices [22][23][24][25][26][27][28][29]. Today, MEMS-based resonators have been used in oscillators [5], filters [16], gyroscope [11], micro-speaker [30], etc.…”

“…Though PZT is one of the most widely studied piezoelectric MEMS material [6,7,[30][31][32], AlN based MEMS resonators on piezoelectric operating principle are found interests among the research community in recent time (5, 22-24, 28, 29], Despite having lower piezoelectric coefficient than PZT, the choice of the AlN is driven by three major factors: (i) excellent thermal and chemical stability [33,34]; (ii) excellent CMOS process compatibility [26]; and (iii) environment-friendly nature [35,36]. Among different MEMS materials, silicon is widely used in MEMS technology because of its excellent mechanical properties, ease of micromachining, relatively low-cost [11,14,15,35,37,38]. Thus, for the fabrication of AlN based MEMS resonator structure, the integration of AlN layers on Si substrates is essential.…”