Design and fabrication of PTFE-filled waveguide cruciform coupler with air-filled posts

Kishihara, Mitsuyoshi; Ikeuchi, Hiroaki; Murai, K.; Azeta, Tsukasa; Utsumi, Yuichi; Kawai, Tadashi; Ohta, Isao

doi:10.1109/mwsym.2011.5972584

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2021

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“…It has been reported that PTFE microstructures can be fabricated by direct exposure to X-ray from synchrotron radiation [7]- [9]. The SR direct etching process or the Xray lithography process has been applied to the fabrication of various PTFE-filled WG circuits [10]- [13]. The fabrication process is considered useful to construct the components for millimeter-wave and submillimeter-wave frequencies.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of PTFE Substrate Integrated Waveguide Coupler by SR Direct Etching

Kishihara

Takeuchi

Yamaguchi

et al. 2021

IEICE Trans. Electron.

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The microfabrication technique based on synchrotron radiation (SR) direct etching process has recently been applied to construct PTFE microstructures. This paper proposes a PTFE substrate integrated waveguide (PTFE SIW). It is expected that the PTFE SIW contributes to the improvement of the structural strength. A rectangular through-hole is introduced taking the advantage of the SR direct etching process. First, a PTFE SIW for the Q-band is designed. Then, a cruciform 3-dB directional coupler consisting of the PTFE SIW is designed and fabricated by the SR direct etching process. The validity of the PTFE SIW coupler is confirmed by measuring the frequency characteristics of the S-parameters. The mechanical strength of the PTFE SIW and the peeling strength of its Au film are also additionally investigated.

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