2007
DOI: 10.1143/jjap.46.5478
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Design and Fabrication of Micro Optical Film by Ultraviolet Roll Imprinting

Abstract: Mossbauer and x-ray diffraction measurements have been made on M,~xFe,(PyNO),(C10,)2, where M is Zn or Mg, for 0 < x s 1. It has been possible to reproduce the Mossbauer spectra reasonably well using a model in which the ferrous ions experience a small off-axial distortion from the nominal trigonal (C3J site symmetry. The Mossbauer results indicate that the proportion of Fe" ions in sites that are distorted from trigonal symmetry varies as a function of iron concentration in the Zn-Fe series but remains appare… Show more

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Cited by 22 publications
(17 citation statements)
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“…60 However the epoxysilicone resin requires an adhesion promoter to be deposited on glass substrates and for high density features on PET substrates in order to prevent delamination and sticking to the ETFE mold. 61 Another investigation into UV roller imprinting was reported by Ahn et al 24,56 Their setup is similar to that shown in Fig. In particular, sub-100 nm linewidth gratings were fabricated and shown in cross-section.…”
Section: B Recent Studies and Proposed Tool Designsmentioning
confidence: 84%
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“…60 However the epoxysilicone resin requires an adhesion promoter to be deposited on glass substrates and for high density features on PET substrates in order to prevent delamination and sticking to the ETFE mold. 61 Another investigation into UV roller imprinting was reported by Ahn et al 24,56 Their setup is similar to that shown in Fig. In particular, sub-100 nm linewidth gratings were fabricated and shown in cross-section.…”
Section: B Recent Studies and Proposed Tool Designsmentioning
confidence: 84%
“…In particular, sub-100 nm linewidth gratings were fabricated and shown in cross-section. 56 They also performed mold replication with UV-curable silicone urethane acrylate photopolymer in order to form thin polymer sheet molds which could also be wrapped around an aluminum base roller. 55 More recently, Guo has unveiled a newly completed six-inch roll-to-roll and roll-to-plate capable apparatus and demonstrated four-inch wide continuous imprinting of somewhat larger 300 nm linewidth and 700 nm period gratings (see Fig.…”
Section: B Recent Studies and Proposed Tool Designsmentioning
confidence: 99%
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