Design and fabrication of MEMS-based active slider using double-layered composite PZT thin film in hard disk drives

Tagawa, Norio; Kitamura, Kenichi; Mori, Atsunobu

doi:10.1109/tmag.2003.808950

Cited by 45 publications

(24 citation statements)

References 10 publications

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“…Some active-head sliders with a PZT unimorph actuator have been proposed. Tagawa et al (2003) proposed a slider using double-layered composite PZT thin film. Kurita et al (2003) proposed a slider using a PZT sheet.…”

Section: Objectivementioning

confidence: 99%

“…The upper electrode is connected to a pad on the magnetic head of the slider. The structures of the proposed active-head sliders (Tagawa et al 2003;Kurita et al 2003;Suzuki and Kurita 2003) have low stiffness, while that of PFC slider has greater stiffness because PFC slider does not have a supporting beam structure and the magnetic head is only driven by PZT deformation. The stiffness has a great influence on fly ability.…”

Section: Objectivementioning

confidence: 99%

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Active-head slider with piezoelectric actuator using shear-mode deformation

et al. 2009

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The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. This paper describes a piezoelectric flying height control slider which has a faster dynamic response compared with conventional active-head sliders. This slider can be also adapted to the conventional slider-fabrication process. PZT layer located near the magnetic head has shear mode deformation by applying electric voltage between the upper and lower electrodes when the flying height of magnetic head needs to be decreased or increased. We fabricated a prototype with single crystal Si substrate for feasibility study. Our evaluation of the prototype revealed that the piezoelectric constant of the shear mode deformation was 0.88 nm/V, and the dynamic response was 50 kHz. The shape of the air bearing surface was optimized by simulations using a robust design method. We found that the stroke was 8 nm for an applied voltage of 11 V if the flying height was 11 nm with no deformation in PZT.

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Section: Objectivementioning

confidence: 99%

Section: Objectivementioning

confidence: 99%

Active-head slider with piezoelectric actuator using shear-mode deformation

et al. 2009

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“…PZT thin-film actuators have wide applications, such as atomic force microscopes (AFM) [57,58], ultrasonic micromotors [59][60][61][62], one-or two-dimensional scanners [63][64][65], microswitches [66], resonators [67,68], and dual-stage actuators/sliders for next-generation computer hard disk drives [1,18,[69][70]. When PZT thin films are incorporated in a mesoor micro-actuator, there are many design challenges to overcome.…”

Section: Design Considerations For Pzt Thin-film Actuators: Measuremementioning

confidence: 99%

PZT Thin-Film Meso- and Micro Devices

Shen

Cao

et al. 2006

Ferroelectrics

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“…Design and fabrication of MEMS-based active slider using double-layered composite PZT thin film in hard disk drives has been demonstrated and hence the mechanical motion of the slider being controlled by the use of MEMS enabled devices is illustrated [35]. MEMS and standard hard drives are compared and the use of MEMS as a disk drive buffer has been proposed earlier [24].…”

Section: Introductionmentioning

confidence: 99%

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

Pathak¹,

Ahmed²,

Joshi

2009

2009 Innovative Technologies in Intelligent Systems and Industrial Applications

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Abstract-We have demonstrated the impact of developments in nanotechnology to Hard Disk Drive (HDD) technology. We have put forth a proposition to enhance the modeling of future storage devices based on innovations in the field of Nanotechnology and MEMS. We have elucidated the influence of recent advances of Nano-Composites, MEMS (Micro Electro Mechanical Systems) etc. and their implications towards the development of storage devices in the future. We have discussed about reliability modeling, nano-physics modeling and thin-film polymer modeling of HDD technology on computer-aided engineering tools such as MATLAB. We have also devised a design of Nanotechnology and MEMS enabled future HDD. We have given a small model for array based MEMS cantilevers for HDD and have used SUGAR MEMS simulation library in MATLAB to model it. We have included the parameters to be kept in mind while modeling a HDD in light of the innovations in Nanotechnology and MEMS. Finally we have stated the working of a MEMS-based actuator and presented its reliability modeling.

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Design and fabrication of MEMS-based active slider using double-layered composite PZT thin film in hard disk drives

Cited by 45 publications

References 10 publications

Active-head slider with piezoelectric actuator using shear-mode deformation

Active-head slider with piezoelectric actuator using shear-mode deformation

PZT Thin-Film Meso- and Micro Devices

Intricate modeling of HDD and reliability analysis in light of advances in Nanotechnology and MEMS

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