Design and fabrication of high-k filled sub-100 nm gap resonators with embedded dielectric field effect transistor for ultra high frequency applications

Casu, Emanuele Andrea; Lopez, Mariazel Maqueda; Vitale, Wolfgang A.; Fernández-Bolaños, Montserrat; Ionescu, Adrian M.

doi:10.1109/snw.2016.7577989

2016 IEEE Silicon Nanoelectronics Workshop (SNW) 2016

DOI: 10.1109/snw.2016.7577989

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Design and fabrication of high-k filled sub-100 nm gap resonators with embedded dielectric field effect transistor for ultra high frequency applications

Emanuele Andrea Casu

Mariazel Maqueda Lopez

Wolfgang A. Vitale

et al.

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Design and fabrication of high-k filled sub-100 nm gap resonators with embedded dielectric field effect transistor for ultra high frequency applications

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References 5 publications

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