Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air

Parkes, W.; Djakov, V.; Barton, James S.; Watson, Stuart; MacPherson, William N.; Stevenson, J.T.M.; Dunare, Camelia

doi:10.1088/0960-1317/17/7/016

Cited by 18 publications

(14 citation statements)

References 13 publications

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“…There have been various types of fiber optic pressure sensors used for shock wave measurements [25], [26]. Here, to study the performance of the polymer based pressure sensors for dynamic pressure measurements, the cross-axial sensor is evaluated under time variant pressure conditions.…”

Section: Measurement Of Transient Pressurementioning

confidence: 99%

Miniature Temperature Compensated Fabry-Perot Pressure Sensors Created with Self-aligned Polymer Photolithography Process

et al. 2011

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We present a cross-axial and a co-axial miniature Fabry-Perot pressure sensor fabricated at the tip of an optical fiber with a prewritten Bragg grating by using maskless photolithography process and UV curing polymer process. The optical fiber serves as an intrinsic mask for sensor fabrication as well as a waveguide for sensor interrogation. A polymer-metal composite thin diaphragm is employed as the pressure transducer. The overall sensor size is almost the same as that of a standard single mode optical fiber. Experimental study shows that the sensors exhibit good linearity over a pressure range of 1.9-9.4 psi, with sensitivities of 0.0094 m psi and 0.0011 mpsi for the cross-axial and co-axial sensors, respectively. The fiber Bragg grating is exploited for simultaneous temperature measurements or to compensate for temperature effects in pressure readings. The dynamic response of the sensors is also evaluated and discussed. These sensors are expected to impact many fronts that require miniature and inexpensive sensors for reliable static and transient pressure measurements of fluids.Index Terms-Fabry-Perot, lithography, pressure measurement, temperature dependence.

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Section: Measurement Of Transient Pressurementioning

confidence: 99%

Miniature Temperature Compensated Fabry-Perot Pressure Sensors Created with Self-aligned Polymer Photolithography Process

et al. 2011

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“…Integration of photonic structures onto the end facets of optical fibers attracted extensive research interests for achieving miniaturized devices of multifold functions [1][2][3][4][5][6]. A variety of techniques have been reported for direct nano-structuring [7,8] or indirect photonic nano-transferring on the fiber ends [9,10].…”

Section: Introductionmentioning

confidence: 99%

Direct Transfer of Metallic Photonic Structures Onto End Facets of Optical Fibers

Liu

Lin

2016

Front. Phys.

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We present a flexible approach to transfer metallic photonic crystals (MPCs) onto end facets of optical fibers. The MPCs were initially fabricated on a glass substrate with a spacer layer of indium tin oxide (ITO), which was used as a buffer layer in the transferring process. The fiber ends were firstly welded on the top surface of the MPCs by a drop of polymer solution after the solvent evaporated. The ITO layer was then etched by hydrochloric acid (HCl), so that the MPCs got off the substrate and were transferred to the fiber ends. Alternatively, the MPCs may be also etched off the substrate first by immersing the sample in HCl. The ultra-thin MPC sheet consisting of gold nanolines interlaced with photoresist gratings was then transferred to cap the fiber ends. In the later approach, we can choose which side of the MPCs to be used as the contact with the fiber facet. Such methods enabled convenient nano-structuring on optical fiber tips and achieving miniaturized MPC devices with compact integration, extending significantly applications of MPCs. In particular, the fabrications presented in this manuscript enrich the lab-on-fiber engineering techniques and the resultant devices have potential applications in remote sensing and detection systems.

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“…Extensive studies related to SW measurements within air-driven shock tubes and real explosion using fiber-optic pressure sensors have been conducted [6,[12][13][14]. Compared with traditional piezoelectricbased sensors [15], fiber-optic pressure sensors have the advantage of fast dynamic response, miniature size, light weight, ease of installation, and immunity to electromagnetic interference.…”

Section: Introductionmentioning

confidence: 99%

“…Unlike other fiber-optic sensors that have limited spatial resolution due to the bulky supporting structure used for direct bonding of sensing element on their fiber head [6,13,14], the fiber-optic sensor presented in this paper has the same diameter as the optical fiber itself, which is generally 125 μm. This compact design allows for a high degree of spatial resolution during blast event measurements.…”

Section: Introductionmentioning

confidence: 99%

Ultrafast Fabry–Perot fiber-optic pressure sensors for multimedia blast event measurements

Zou

Tian

et al. 2013

Appl. Opt.

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A shock wave (SW) is characterized as a large pressure fluctuation that typically lasts only a few milliseconds. On the battlefield, SWs pose a serious threat to soldiers who are exposed to explosions, which may lead to blast-induced traumatic brain injuries. SWs can also be used beneficially and have been applied to a variety of medical treatments due to their unique interaction with tissues and cells. Consequently, it is important to have sensors that can quantify SW dynamics in order to better understand the physical interaction between body tissue and the incident acoustic wave. In this paper, the ultrafast fiber-optic sensor based on the Fabry-Perot interferometric principle was designed and four such sensors were fabricated to quantify a blast event within different media, simultaneously. The compact design of the fiber-optic sensor allows for a high degree of spatial resolution when capturing the wavefront of the traveling SW. Several blast event experiments were conducted within different media (e.g., air, rubber membrane, and water) to evaluate the sensor's performance. This research revealed valuable knowledge for further study of SW behavior and SW-related applications.

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Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement in air

Cited by 18 publications

References 13 publications

Miniature Temperature Compensated Fabry-Perot Pressure Sensors Created with Self-aligned Polymer Photolithography Process

Miniature Temperature Compensated Fabry-Perot Pressure Sensors Created with Self-aligned Polymer Photolithography Process

Direct Transfer of Metallic Photonic Structures Onto End Facets of Optical Fibers

Ultrafast Fabry–Perot fiber-optic pressure sensors for multimedia blast event measurements

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