Design and Fabrication of an All‐Solid‐State Thin‐Film Li‐Ion Microbattery with Amorphous TiO<sub>2</sub> as the Anode

Feng, Jinkui; Yan, Binggong; Lai, M.O.; Li, Lü

doi:10.1002/ente.201300173

Cited by 20 publications

(12 citation statements)

References 17 publications

(8 reference statements)

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“…A 200 nm thick amorphous TiO 2 film was used as an anode in a battery based on a 250 nm thick NMC111 cathode and a LiPON electrolyte. [193] This cell showed an initial discharge capacity of 52 𝜇Ah cm −2 µm −1 , and still exhibited 86% of the initial capacity after 100 cycles. The cell showed high polarization due to the absence of conductive additives in the electrodes.…”

Section: Conversion-type Electrode Materialsmentioning

confidence: 88%

“…Therefore, cycling was carried out between 3 and 5 V. The high upper cut-off voltage can lead to degradation of the cathode, which could explain the low capacity as well as the deterioration of the cell. [193] ZnO is another interesting type of anode material in which a conversion reaction to Zn and Li 2 O is followed by alloying of Zn and Li, which theoretically enables the accommodation of up to 3 Li ions per unit structure. Studies on thin ZnO films deposited by PLD and sputtering from ceramic targets showed, however, that a large amount of capacity, e.g., 55% or 44% was lost during the first charge cycle for undoped ZnO layers.…”

Section: Conversion-type Electrode Materialsmentioning

confidence: 99%

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Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

et al. 2021

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This review discusses the contribution of physical vapor deposition (PVD) processes to the development of electrochemical energy storage systems with emphasis on solid‐state batteries. A brief overview of different PVD technologies and details highlighting the utility of PVD for the fabrication and characterization of individual battery materials are provided. In this context, the key methods that have been developed for the fabrication of solid electrolytes and active electrode materials with well‐defined properties are described, and demonstrations of how these techniques facilitate the in‐depth understanding of fundamental material properties and interfacial phenomena as well as the development of new materials are provided. Beyond the discussion of single components and interfaces, the progress on the device scale is also presented. State‐of‐the‐art solid‐state batteries, both academic and commercial types, are assessed in view of energy and power density as well as long‐term stability. Finally, recent efforts to improve the power and energy density through the development of 3D‐structured cells and the investigation of bulk cells are discussed.

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Section: Conversion-type Electrode Materialsmentioning

confidence: 88%

Section: Conversion-type Electrode Materialsmentioning

confidence: 99%

Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

et al. 2021

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“…The main Li extraction potential is centered around 1.75 V vs Li + /Li with similar broad potential distributions as observed in the liquid configuration cell (see in Figure S6a–c). This behavior is commonly accepted for the amorphous TiO 2 phase deposited by ALD, which presents a high amount of defects and Li insertion/extraction sites at various redox potentials . Similar current density levels are observed for both anodic and cathodic scans for each TiO 2 thickness.…”

Section: Resultsmentioning

confidence: 99%

Hybrid All-Solid-State Thin-Film Micro-supercapacitor Based on a Pseudocapacitive Amorphous TiO₂ Electrode

Sallaz

Poulet

Rouchou

et al. 2022

ACS Appl. Energy Mater.

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In this work, nanometric (6−21 nm thick) amorphous TiO 2 films have been elaborated and characterized in liquid-and solid-state electrolyte (LiPON) half-cell architectures. For all considered configurations, the volumetric capacity extracted from cyclic voltammetry and galvanostatic cycling within the 0.5−3 V potential range almost corresponds to the theoretical value expected for the Li x TiO 2 (x ∼ 1) phase at low current density. Interestingly, TiO 2 films after LiPON deposition exhibited a thickness-independent constant initial amount of intercalated lithium ions and did not require a first activation process, in comparison to the liquid electrolyte configuration. Furthermore, the cooperative effects of high Li + intercalation kinetics and low interfacial charge transfer resistance for a 6 nm TiO 2 electrode led to an outstanding surface capacity of 0.7 μAh cm −2 at 1 μA cm −2 and high rate performance with 60% capacity holding ratio at 1 mA cm −2 , thus highlighting the extrinsic pseudocapacitive behavior of our sub-10 nm TiO 2 electrodes. A Li x TiO 2 6 nm/LiPON 100 nm/Pt hybrid micro-supercapacitor has been successfully fabricated, achieving an operating voltage window of 3 V and a surface capacitance of 94 μF cm −2 at 50 mV s −1 . In addition, the device also exhibited 97% coulombic efficiency upon cycling for 10,000 continuous charge−discharge cycles. This work proposes an approach that allows us to adjust the Li-ion storage properties of TiO 2 by nanoengineering and gives insights into the electrochemical performance enhancement by taking advantage of the pseudocapacitance-assisted lithium storage mechanism.

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“…The most popular technique is in situ rf‐sputtering growth, [ 41 , 42 , 43 ] in which the in situ rf‐sputtering is carried out using Li 3 PO 4 as the target in a N 2 atmosphere. [ 44 , 45 , 46 ] During the deposition, N 2 gas is ionized and the ionized N ions then react with Li–P–O species forming in situ LiPON on the substrate. Deposition of LiPON is difficult since it should be deposited at low temperature in order to achieve an amorphous structure.…”

Section: Solid‐state Electrolytesmentioning

confidence: 99%

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Dai

et al. 2021

Advanced Science

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Continuous advances in microelectronics and micro/nanoelectromechanical systems enable the use of microsized energy storage devices, namely solid-state thin-film -batteries. Different from the current button batteries, the -battery can directly be integrated on microchips forming a very compact "system on chip" since no liquid electrolyte is used in the -battery. The all-solid-state battery (ASSB) that uses solid-state electrolyte has become a research trend because of its high safety and increased capacity. The solid-state thin-film -battery belongs to the family of ASSB but in a small format. However, a lot of scientific and technical issues and challenges are to be resolved before its real application, including the ionic conductivity of the solid-state electrolyte, the electrical conductivity of the electrode, integration technologies, electrochemical-induced strain, etc. To achieve this goal, understanding the processing of thin films and fundamentals of ion transfer in the solid-state electrolytes and hence in the -batteries becomes utmost important. This review therefore focuses on solid-state ionics and provides inside of ion transportation in the solid state and effects of chemistry on electrochemical behaviors and proposes key technology for processing of the -battery.

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Design and Fabrication of an All‐Solid‐State Thin‐Film Li‐Ion Microbattery with Amorphous TiO₂ as the Anode

Cited by 20 publications

References 17 publications

Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

Hybrid All-Solid-State Thin-Film Micro-supercapacitor Based on a Pseudocapacitive Amorphous TiO₂ Electrode

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

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Design and Fabrication of an All‐Solid‐State Thin‐Film Li‐Ion Microbattery with Amorphous TiO2 as the Anode

Cited by 20 publications

References 17 publications

Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

Physical Vapor Deposition in Solid‐State Battery Development: From Materials to Devices

Hybrid All-Solid-State Thin-Film Micro-supercapacitor Based on a Pseudocapacitive Amorphous TiO2 Electrode

All‐Solid‐State Thin Film μ‐Batteries for Microelectronics

Contact Info

Product

Resources

About

Design and Fabrication of an All‐Solid‐State Thin‐Film Li‐Ion Microbattery with Amorphous TiO₂ as the Anode

Hybrid All-Solid-State Thin-Film Micro-supercapacitor Based on a Pseudocapacitive Amorphous TiO₂ Electrode