Design and Development of MEMS Pressure Sensor Characterization Setup with Low Interfacing Noise by Using NI-PXI System

Singh, Kulwant; Akhtar, Sualeh; Varghese, Soney; Akhtar, Jamil

doi:10.1007/978-3-319-03002-9_112

Cited by 3 publications

(4 citation statements)

References 7 publications

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“…From the beginning era of mid-1970, MEMS (microelectromechanical systems based devices) have materialized as an state-of-the-art technology by creating new preambles in the physical [8], in the chemical [9] and in the biological [10] sensors and actuator solicitations and utilizations. Albeit MEMS technology transpires from IC manufacture techniques, assessment approaches [11] of both technologies expressively differ from one another.…”

Section: About Mems Technologymentioning

confidence: 99%

A Review for Luminescence Property of Materials, Its Detection and Probabilities for Embedding of Luminescence with MEMS Technology

Mishra

Dubey

et al. 2021

Adv. Mater. Lett.

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Section: About Mems Technologymentioning

confidence: 99%

A Review for Luminescence Property of Materials, Its Detection and Probabilities for Embedding of Luminescence with MEMS Technology

Mishra

Dubey

et al. 2021

Adv. Mater. Lett.

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“…Vibration, shock, and mechanical wear (1) Weibull statistics was used to analyze the fracture tests on the beam by applying different loads.…”

Section: Thermal Actuatorsmentioning

confidence: 99%

“…Since the mid-1970, MEMS (microelectromechanical systems) have emerged as an innovative technology by creating new opportunities in physical [1], chemical [2], and biological [3] sensors and actuator applications. Although MEMS technology emerges from IC fabrication techniques, test methods [4] of both technologies significantly differ from each other.…”

Section: Introductionmentioning

confidence: 99%

A Review on Key Issues and Challenges in Devices Level MEMS Testing

et al. 2016

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The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market.

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“…From the beginning of mid-1970, MEMS (microelectromechanical systems) have emerged as an innovative technology by creating new openings in physical [1], chemical [2] and biological [3] sensors and actuator applications. Even though MEMS technology emerges from IC fabrication techniques, test methods [4] of both technologies significantly differ from each other.…”

Section: Introduction Of Mems Technologymentioning

confidence: 99%

MEMS Technology: A Review

Mishra

Dubey

Mishra

et al. 2019

JERR

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This review article through light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. Microelectromechanical system discloses outstanding flexibility and adaptability in miniaturization devices followed by their compact dimension, low power consumption, and fine performance. The MEMS devices have numerous and very high potentials of creating a new field of applications for mobile equipment’s with increased flexibility & more reliability. This work deals with research carried out for the development of MEMS based sensors & Actuators and appropriate uses of MEMS. This work carries information’s regarding subsequent commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages. This work also describes the historical development of micro-electromechanical system (MEMS) sensor technology.

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Design and Development of MEMS Pressure Sensor Characterization Setup with Low Interfacing Noise by Using NI-PXI System

Cited by 3 publications

References 7 publications

A Review for Luminescence Property of Materials, Its Detection and Probabilities for Embedding of Luminescence with MEMS Technology

A Review for Luminescence Property of Materials, Its Detection and Probabilities for Embedding of Luminescence with MEMS Technology

A Review on Key Issues and Challenges in Devices Level MEMS Testing

MEMS Technology: A Review

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