Design and development of a new large-stroke XY compliant micropositioning stage

Wan, Sicong; Xu, Qingsong

doi:10.1177/0954406216643341

Cited by 15 publications

(10 citation statements)

References 20 publications

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“…Because of the decoupled output motion, the system can be treated as a combination of multiple single-input single-output (SISO) systems. Some typical decouplers have been used in recent research (see Figure 8), such as parallelogram flexure (PF), compound parallelogram flexure (CPF) and the Roberts mechanism (RM) [83]. In comparison with the serial scheme, the parallel scheme can provide larger stiffness, faster response, no accumulated error and identical dynamic performance on each axis by applying a symmetrical design.…”

Section: Parallel Scheme Designmentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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Section: Parallel Scheme Designmentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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“…Compliant mechanisms of monolithic piece mechanically amplify the micro stroke of piezoelectric actuators without wear and backlash, and the requirement of assembly is largely reduced. [28][29][30] In addition, piezoelectric stacks can support little tensile or shear forces. Flexure-based compliant mechanisms can provide a preload and restoring force through elastic deformation, rendering piezoelectric stacks suitable for generating reciprocating motions in flow control valves.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear coupled dynamic effects in flexure-amplified piezoelectric valve with an analytical transfer function

Ling

Wang

2022

Proceedings of the Institution of Mechanical Engineers, Part C:

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There have been a number of publications on designing flow control valves with piezoelectric actuators or their amplified alternatives for potential use in high-speed fluid control devices. However, less attention is focused on the coupled and nonlinear dynamic behaviors of piezo-hydraulic systems. In the present study, it is theoretically demonstrated that the hydraulic nonlinear and coupled dynamic behaviors have a large influence on the flow characteristic of flexure-amplified piezoelectric valve. To this end, the analytical transfer function of a typical two-stage flow control valve driven by mechanically amplified piezoelectric stacks is derived to capture its coupled and nonlinear dynamic characteristics. The modeling process involves a multi-domain dynamic issue with electro-mechanical dynamics of piezoelectric stacks, elasto-mechanical dynamics of compliant mechanisms and hydraulic dynamics. The structural parameters among piezoelectric stack, compliant amplifying mechanism and hydraulics are optimally matched based on the analytical transfer function. An optimum prototype is also fabricated and experimentally evaluated. The obtained results clearly show the key role of optimizing the coupled dynamic parameters in designing flexure-amplified piezoelectric flow control valves.

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“…Tip-tilt-piston micropositioning stages are required and used in various fields and industries including ultra-precision grinding operations, 1 optical instrument alignment, 2,3 and articulated tool-heads applications. 4 Given that flexure hinges have the advantages of no friction, no wear, and no backlash, 5 flexure-based tip-tilt-piston stages have been extensively developed. 6–9 Owing to their distributed compliance and simple configuration, leaf-spring flexure hinges are widely used in flexure-based stages with large travel ranges.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear static modeling of a tip-tilt-piston micropositioning stage comprising leaf-spring flexure hinges

Chen

Liu

Ding

2020

Proceedings of the Institution of Mechanical Engineers, Part C:

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Nonlinear static modeling is crucial for the design of stages with large travel ranges. However, few studies have investigated complex spatial compliant mechanisms. The present study proposes an optimization algorithm based on substructure constraint conditions to formulate the nonlinearity of the force–displacement characteristic of a tip-tilt-piston stage comprising leaf-spring flexure hinges. First, the nonlinear force–displacement characteristics of the compound basic parallelogram mechanism are derived using an optimization algorithm based on two constraint conditions (I and II). Second, the nonlinear static modeling of the tip-tilt-piston stage is conducted based on the modeling results of the compound basic parallelogram mechanism. The stage is divided into three parts, and force analyses are conducted for all three parts. The vertical displacement of the compound basic parallelogram mechanism in part 1 and the rotational angle of the rotational plate in part 2 are calculated. Subsequently, the force–displacement characteristics of the tip-tilt-piston stage are obtained based on a third constraint condition (III). A comparison of the finite element analysis results and the theoretical calculation indicates less than 4% errors. In the experimental tests conducted on the proposed stage and four compound basic parallelogram mechanisms, the displacements were evidently larger than those calculated using the finite element analysis. Therefore, a weight coefficient of the axial force w is introduced in the theoretical calculation to solve the problem of the large deviations between the experimental results and the finite element analysis results. When w is set to 1, the theoretical results are in good agreement with the finite element analysis results; when w is set to 0.05 for the tip-tilt-piston stage and 0.15 for compound basic parallelogram mechanisms, the theoretical results are consistent with the experimental results (less than 8.5% errors).

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Design and development of a new large-stroke XY compliant micropositioning stage

Cited by 15 publications

References 20 publications

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Nonlinear coupled dynamic effects in flexure-amplified piezoelectric valve with an analytical transfer function

Nonlinear static modeling of a tip-tilt-piston micropositioning stage comprising leaf-spring flexure hinges

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