Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

Bozchalooi, Iman Soltani; Houck, Andrew; AlGhamdi, Jwaher M.; Youcef‐Toumi, Kamal

doi:10.1016/j.ultramic.2015.10.016

Cited by 31 publications

(13 citation statements)

References 35 publications

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“…In (2), F is the electrostatic force on the probe; ε0 is the dielectric constant of the specimen material; h is the thickness of the dielectric medium (specimen); d is the vertical distance from the surface of the dielectric medium (specimen) to the tip of the probe; A is the area of the probe tip projected onto the surface of the specimen; and Ubt is the voltage of the external electric field.…”

Section: A Analysis Of Electrostatic Force On the Probementioning

confidence: 99%

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Meng

Tan

et al. 2018

Measurement Science Review

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A home-made electrostatic force microscopy (EFM) system is described which is directed toward assessment of the microscopic geometry of the surface of specimens made of non-conductive material with a large thickness. This system is based on the variation in the electrostatic force between the conductive probe and the non-conductive specimen in order to get its surface morphology. First, based on the principle of dielectric polarization, the variation rules of the electrostatic force between the charged probe and the non-conductive specimen were studied. Later, a special tuning fork resonant probe unit made of quartz crystal was fabricated for measurement of the electrostatic force, and the scanning probe microscopic system in the constant force mode was constructed to characterize the three-dimensional micro-topography of the surface of the specimen. Finally, this system was used to perform scanning measurement experiments on the indented surface of the specimen made of the polyvinyl chloride (PVC) material with thickness 3 mm. In the present experimental system, when the external voltage was 100 V and the distance from the probe tip to the specimen surface approximately 100 nm, the variance in the resonant frequency of the probe unit was around 0.5 Hz. These results indicate that this home-made EFM system can effectively characterize the micro-topography of the non-conductive specimen with very large thickness which is above several millimeters.

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Section: A Analysis Of Electrostatic Force On the Probementioning

confidence: 99%

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Meng

Tan

et al. 2018

Measurement Science Review

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“…In order to circumvent this issue, we combine microactuated cantilevers with highspeed "macro" piezoactuators. Therefore, a multiactuated nanopositioner with more than 125 lm lateral range and several microns of out-plane-range 20,59 was developed, described in Sec. III D. By combining the actuation capability of our micro-and nanopositioning systems, we are able to simultaneously meet the range and speed requirements of more challenging applications, e.g., in surface engineering or in high-throughput nanolithography for single-digit nanodevices.…”

Section: Afm With Arrays Of Active Cantileversmentioning

confidence: 99%

“…In this form, although the combined controller can be very complex (high-order), from the user's perspective the same gains are tuned as in conventional scanning probe microscopes. 20 Since for every single actuator a separate compensator is needed, the design can be implemented in a sequential manner, starting with the slowest actuator moving toward higher frequencies.…”

Section: E Applied Scanner Control Strategymentioning

confidence: 99%

“…By properly designing the associated control, one can benefit from both types of actuators in simultaneously achieving large range and highspeed performance. 4,5,20 Due to the complications associated with dynamic coupling of such multicomponent scanners, the control design is often too complex for daily applications in microscopy technologies where users are often unaware of the control design intricacies. Proportional-integral-derivative (PID) controllers are widely accepted by users due to their simplicity.…”

Section: Introductionmentioning

confidence: 99%

“…The designed controller, although potentially very complex in terms of handling dynamics, appears from the user perspective as simple as a PID. 20 With combined high speed and large range scanning capability, a large range overview of the sample can be obtained and moreover, high frame rate imaging of a zoomed-in local area can be achieved. When combined with active probe sensor arrays, the performance of high-speed large-range AFM system can be significantly improved.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Rangelow

Ivanov

Ahmad

et al. 2017

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task, such as the feature aspect ratio, required range, or acceptable probe-sample interaction forces. In this paper, the authors discuss these requirements and the research directions that provide the highest potential in meeting them. The authors elaborate on the efforts toward the downsizing of self-sensed and self-actuated probes as well as on upscaling by active cantilever arrays. The authors present the fabrication process of active probes along with the tip customizations carried out targeting specific application fields. As promising application in scope of nanofabrication, field emission scanning probe lithography is introduced. The authors further discuss their control and design approach. Here, microactuators, e.g., multilayer microcantilevers, and macroactuators, e.g., flexure scanners, are combined in order to simultaneously meet both the range and speed requirements of a new generation of scanning probe microscopes.

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Mechanical Design and Control for Speed and Precision

Nagel¹,

Leang²

2019

Encyclopedia of Systems and Control

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Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

Cited by 31 publications

References 35 publications

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices

Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Mechanical Design and Control for Speed and Precision

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