Design and control of flexure based XYϑZ stage

Kang, Dongwoo; Kım, Kihyun; Choi, Yun‐Jaie; Gweon, Dae−Gab; Lee, Sung‐Hee; Lee, Moongoo

doi:10.1007/bf02916513

Cited by 12 publications

(4 citation statements)

References 7 publications

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“…Kang presented an ultraprecision XYθ Z stage as a fine stage, where the design utilizes a plane mechanism and symmetric hexagonal structure that consists of a monolithic flexure hinge mechanism with three piezoelectric actuators and six flexures preserving the plane motion. 8 Yong studied the effects of the accuracies of flexure hinge equations on the output compliances of micromotion stages. 9 However, these stages have no amplification mechanism, so the working range of the stage is very small.…”

Section: B Review Of Previous Researchmentioning

confidence: 99%

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Development of a novel 3-degrees of freedom flexure based positioning system

Kim

Ahn

Gweon

2012

Review of Scientific Instruments

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Flexure mechanisms have been widely used for nanometer positioning systems. This article presents a novel conceptual design of an ultra-precision 3-degrees of freedom (XYθ(Z)) positioning system with nanometer precision. The main purpose of this novel stage design is for the application of measurement equipment, in particular biological specimens. The stage was designed as a hollow type and with a compact size for the inverted microscope. This stage includes piezoelectric transducer actuators, double compound amplification mechanisms, moving plate, and capacitor sensors. The double compound amplification mechanism was designed using a mathematical model and analyzed by the finite element method. Since the relationship between the variables of the hinge parameters and system performances are complicated, an optimization procedure was used to obtain the optimal design parameters, which maximized the system bandwidth. Based on the solution of the optimization problem, the design of the stage and FEM simulation results are presented. Finally, the stage was manufactured and tested.

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Section: B Review Of Previous Researchmentioning

confidence: 99%

“…(13) are the natural frequencies of the system. 8,30 The natural frequency verification results via FEM presented in Table III and Fig. 9 show the mode shapes of the lower three modes.…”

Section: Modelingmentioning

confidence: 99%

Development of a novel 3-degrees of freedom flexure based positioning system

Kim

Ahn

Gweon

2012

Review of Scientific Instruments

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“…25 Also the flexure hinge can overcome shortcomings such as friction, lubrication and backlash which usually exist in the conventional mechanisms with sliding and rolling bearings. 26 So, the purpose of precision driving and miniaturization can be achieved easily by the combination of the piezoelectric actuator and flexure hinge.…”

Section: A the Precision Driven Unitmentioning

confidence: 99%

A novel and compact nanoindentation device for in situ nanoindentation tests inside the scanning electron microscope

Huang

Zhao

et al. 2012

AIP Advances

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In situ nanomechanical tests provide a unique insight into mechanical behaviors of materials, such as fracture onset and crack propagation, shear band formation and so on. This paper presents a novel in situ nanoindentation device with dimensions of 103mm×74mm×60mm. Integrating the stepper motor, the piezoelectric actuator and the flexure hinge, the device can realize coarse adjustment of the specimen and precision loading and unloading of the indenter automatically. A novel indenter holder was designed to guarantee that the indenter penetrates into and withdraws from the specimen surface vertically. Closed-loop control of the indentation process was established to solve the problem of nonlinearity of the piezoelectric actuator and to enrich the loading modes. The in situ indentation test of Indium Phosphide (InP) inside the scanning electron microscope (SEM) was carried out and the experimental result indicates the feasibility of the developed device

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“…The piezoelectric actuator takes advantages of small size, unlimited resolution, large force generation, fast response, low power consumption and no wear . Also the flexure hinge can overcome shortcomings such as friction, lubrication and backlash which usually exist in the conventional mechanisms with sliding and rolling bearings (Kang et al, 2005). So, purpose of precision driving and miniaturization can be achieved easily by the combination of the piezoelectric actuator and the flexure hinge.…”

Section: The Precision Driven Unitmentioning

confidence: 99%