A novel and compact nanoindentation device for in situ nanoindentation tests inside the scanning electron microscope

Huang, Hu; Zhao, Hongwei; Mi, Jie; Yang, Jie; Wan, Shengpeng; Xu, Linlin; Ma, Zhichao

doi:10.1063/1.3676691

Cited by 26 publications

(19 citation statements)

References 26 publications

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“…In addition, related to positioning stage for nanoindentation tester, Huang et al proposed a novel in situ nanoindentation instrument with the maximal output displacement of about 11.44 μm. e device can realize coarse modification and accuracy loading and unloading procedure automatically [10]. Moreover, the minimal indentation instrument with the operating stroke of 40 μm for indenter was developed by Huang et al [11].…”

Section: Introductionmentioning

confidence: 99%

Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Dang

et al. 2021

Mathematical Problems in Engineering

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A novel compliant z-stage is applied for positioning and indenting a specimen in nano/microindentation testing system. For an excellent operation, the proposed z-stage can concurrently satisfy multicriteria comprising high safety factor, small parasitic motion, and large output displacement. The key aims of this article are to present a novel design of the compliant z-stage as well as an effective integration methodology of Taguchi method, response surface method, weight factor calculation based on signal to noise, and the whale optimization algorithm to resolve a design optimal problem so as to enrich the quality performances of the proposed stage. Primarily, the z-stage is designed based on four-lever amplifier, compliant hinge shifted arrangement mechanism, zigzag-based flexure spring guiding mechanism, and symmetric six leaf hinges-based parallel guiding mechanism. Secondly, the number experiment data are achieved by the Taguchi method and finite element analysis. Subsequently, the regression functions among input variables and quality characteristics are formed by exploiting response surface method. In addition, the weight factors for every characteristic are defined. Additionally, the sensitivity analysis is accomplished for determining influences of input variables on quality responses. Ultimately, based on regression equations, the whale optimization algorithm is executed to define the optimal factors. The consequences indicated that the output deformation is about 454.55 μm and the safety factor is around 2.38. Furthermore, the errors among the optimal consequences and the confirmations for the safety factor and output deformation are 7.12% and 4.25%, correspondingly. By using Wilcoxon and Friedman methods, the results revealed that the proposed algorithm is better than the cuckoo search algorithm. Based on the quality convergence characteristics of hybrid approach, the proposed method is proficient for resolving complicated multiobjective optimization.

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Section: Introductionmentioning

confidence: 99%

Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Dang

et al. 2021

Mathematical Problems in Engineering

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“…It is often used in ultra-precision instruments such as micro motion device, micro-positioning device, precision positioning stage in atomic force microscope, optical automatic focusing system and optical fiber docking device. Flexible hinge mobile platform has important application value in micro nano manufacturing, micro electro mechanical system (MEMS), scanning electron microscope, micro gripper, manipulator, even 3D printing, robot and other precision engineering fields [ 1 , 2 , 3 , 4 , 5 , 6 ] due to its high efficiency, no backlash transmission, high resolution and precise control, simple and compact structure [ 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform

Wang

et al. 2020

Micromachines

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A new type of rigid-flexible coupling three degrees of freedom (3-DOF) micro-positioning platform with high positioning accuracy and high bearing capacity is developed, which consists of flexible drive mechanism and rigid platform. The flexible drive mechanism consists of three sets of symmetrical parallel round flexible hinge structures, each with a wedge structure in the middle of the symmetrical parallel flexible hinge. The rigid platform has an inclined plane with the same angle as the wedge, while the wedge structure is used to achieve the self-locking effect. The flexibility matrix method and ANSYS are used to analyze the statics of the flexible drive mechanism. The first four natural frequencies of the platform are obtained by dynamic simulation analysis. A symmetrical rigid flexible coupling micro-positioning platform experimental system is developed. Output characteristics, positioning accuracy, relationship between frequency and amplitude, and bearing performance of the micro-positioning platform are tested. These experimental results obviously show that the micro-positioning platform has good motion characteristics, high positioning accuracy, large movement distance, and large load bearing capacity performance.

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“…7,8 The in situ nano-indentation/scratch devices are used for surveying material mechanical behaviors like crack propagation and shear band formation. 9,10 Besides, the flexure hinges have also been widely employed in many other significant applications, such as the missile-control devices, displacement or force amplifiers, small-scale insect-like walking robots, robotic micro-displacement mechanisms, orthotic prostheses, valves, actuators of micro unmanned aerial vehicles, nano-scale bioengineering and nano-imprinting. 11…”

Section: Introductionmentioning

confidence: 99%

The performance comparison of typical notched flexure hinges

Wei

Wang

Zhou

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part C:

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Flexure hinges, which serve as the crucial joints in a large number of compliant mechanisms, have been widely applied in a variety of significant fields where there is high demand for the micro/nano motions with high resolution and high precision. Currently, an increasing number of notched flexure hinges with different structures and performances have been rapidly developed, but the existing performance comparisons on different notched flexure hinges were only conducted on seldom typical structures and are far from the comprehensiveness and fairness due to the different comparative conditions and discrepant evaluating indexes. Therefore, the finite beam-based matrix modeling method and nondimension precision factors will be employed in comprehensive comparing and ranking of 13 types of frequently-used notched flexure hinges in terms of their main compliances, motion accuracies, and stress concentrations, further providing useful practical guidelines to develop the compliant mechanisms with excellent overall performances.

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A novel and compact nanoindentation device for in situ nanoindentation tests inside the scanning electron microscope

Cited by 26 publications

References 26 publications

Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform

The performance comparison of typical notched flexure hinges

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