2018 Annual American Control Conference (ACC) 2018
DOI: 10.23919/acc.2018.8431801
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Design and Control of a Multi-actuated High-bandwidth and Large-range Scanner for Atomic Force Microscopy

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Cited by 6 publications
(2 citation statements)
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“…In practice, the scanner bandwidth and resolution is usually a trade of against the range of operation and need to be adjusted correspondingly. Designing scanner with better performance to push this boundary is an active field of research with techniques such as multi-actuation [ 31 , 32 ].…”
Section: High-speed Afmmentioning
confidence: 99%
“…In practice, the scanner bandwidth and resolution is usually a trade of against the range of operation and need to be adjusted correspondingly. Designing scanner with better performance to push this boundary is an active field of research with techniques such as multi-actuation [ 31 , 32 ].…”
Section: High-speed Afmmentioning
confidence: 99%
“…The X-axis has a 10 kHz bandwidth with maximum of 6.5 micron travel range. Although not being the focus of the this preliminary study on coated active probe performance, the high-speed scanner offers potential for dynamic phenomenon visualization with more details available in reference [19]. High-speed imaging using coated active probes would require contact mode operation with a coating material that maintains sharpness of the probe tip.…”
Section: Afm Imaging System Designmentioning
confidence: 99%