Design and characterization of MIKES metrological atomic force microscope

Korpelainen, Virpi; Seppä, Jeremias; Lassila, Antti

doi:10.1016/j.precisioneng.2010.04.002

Cited by 57 publications

(44 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…1, which defines the coordinate system of the instrument. Experience in characterizing mSPMs at other metrology institutes [4][5][6][7][8][9] has shown that the metrological frame is the dominant source of measurement uncertainties arising from alignment errors, particularly Abbé errors and nonorthogonality of the measurement axes, and environmental vibration. To achieve the target total uncertainty of dimensional measurements, minimizing these contributions is a principal consideration in the design of the metrological frame and the material selected for its construction.…”

Section: System Integrationmentioning

confidence: 99%

“…1,2 The challenge in realizing this mSPM concept is to create a macroscopic mechanical instrument capable of traceable dimensional measurement at the nanoscale with a combined uncertainty of less than 1 nm. Experience in designing ultraprecision mechanical stages and instruments 3 and in operating similar mSPMs at other metrology institutes [4][5][6][7][8][9] has shown that there are many contributions to the uncertainty of the displacement measurements. These include alignment errors (particularly Abbé errors 10 ), deformations of the mechanical structures (for instance, due to thermal expansion), motion errors of the translation stage, form errors of the interferometer mirrors, nonlinearities of the interferometers, and fluctuations in the refractive index of air.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Metrological scanning probe microscope based on a quartz tuning fork detector

Babić

Freund

Herrmann

et al. 2012

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

Abstract. We give an overview of the design of a metrological scanning probe microscope (mSPM) currently under development at the National Measurement Institute Australia (NMIA) and report on preliminary results on the implementation of key components. The mSPM is being developed as part of the nanometrology program at NMIA and will provide the link in the traceability chain between dimensional measurements made at the nanometer scale and the realization of the International System of Units (SI) meter at NMIA. The instrument is based on a quartz tuning fork (QTF) detector and will provide a measurement volume of 100 μm × 100 μm × 25 μm with a target uncertainty of 1 nm for the position measurement. Characterization results of the nanopositioning stage and the QTF detector are presented along with an outline of the method for tip mounting on the QTFs. Initial imaging results are also presented. © 2012Society of Photo-Optical Instrumentation Engineers (SPIE).

show abstract

Section: System Integrationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Metrological scanning probe microscope based on a quartz tuning fork detector

Babić

Freund

Herrmann

et al. 2012

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

show abstract

“…Scanning over an area below approximately 1 x 1 mm can be done with PZT driven flexture stages with virtually no backlash, and sensitivity and resolution on the nm level or better [10,11]. The design of the stage relies on flexible joints and suffers from the presence of angle deviations over the scanning range.…”

Section: Conceptsmentioning

confidence: 99%

Multiaxis interferometric displacement measurement for local probe microscopy

et al. 2011

View full text Add to dashboard Cite

Ê Ú ¾ ÂÙÒ ¾¼½½ ÔØ ½¾ ÇØÓ Ö ¾¼½½ ×ØÖ ØWe present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

show abstract

“…This so-called short-range metrological SPM employs a piezo-driven stage held on flexure joints with virtually no backlash, and with high sensitivity [3], [4]. Here, the positioning range is below 1 mm.…”

Section: Introductionmentioning

confidence: 99%

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Holá

Hrabina

Šarbort

et al. 2015

Measurement Science Review

View full text Add to dashboard Cite

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.

show abstract

Design and characterization of MIKES metrological atomic force microscope

Cited by 57 publications

References 28 publications

Metrological scanning probe microscope based on a quartz tuning fork detector

Metrological scanning probe microscope based on a quartz tuning fork detector

Multiaxis interferometric displacement measurement for local probe microscopy

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Contact Info

Product

Resources

About