2012 International Conference on Devices, Circuits and Systems (ICDCS) 2012
DOI: 10.1109/icdcsyst.2012.6188649
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Design and characterization of MEMS thermal actuator

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Cited by 3 publications
(3 citation statements)
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“…The ever-increasing interest in miniaturized mechanical devices requires novel materials for actuators with micrometer to millimeter size. The currently used actuators include piezoelectric, magnetostrictive, and electromagnetic materials.…”
mentioning
confidence: 99%
“…The ever-increasing interest in miniaturized mechanical devices requires novel materials for actuators with micrometer to millimeter size. The currently used actuators include piezoelectric, magnetostrictive, and electromagnetic materials.…”
mentioning
confidence: 99%
“…For this purpose we performed electro-thermomechanical simulations in order to obtain the temperature and displacement values during the actuation (FIGURES [3][4][5]. The boundary conditions of the simulations used for experimental thermal actuator were the following: the initial temperature of the whole structure and the temperature of the environment were considered to be T 0 =20 o C and the air convection coefficient was set to 20 W/m 2 K. The material properties settings for the Aluminum were assumed to be: the Young's modulus of 77 GPa, the Poisson's ratio of 0.3, the thermal coefficient of expansion of 2.3×10 -5 K -1 and the thermal conductivity depends on the temperature values [16].…”
Section: Figure 2 the Effects Of The Thermal Expansionmentioning
confidence: 99%
“…Magnetic actuation uses Lorentz Force Equation or the theory of magnetism to convert an electrical signal (current) into a mechanical output (displacement). This kind of actuators requires special conditions for fabrication [4][5][6][7][8]. Piezoelectric actuators have the capability to convert an electrical energy into mechanical energy or vice versa and they don't have moving parts like thermal or other types of actuators.…”
Section: Introductionmentioning
confidence: 99%