Design and characterization of a fully compliant out-of-plane thermal actuator

Ogando, Karim; Forgia, Nicolás La; Zárate, Juan José; Pastoriza, H.

doi:10.1016/j.sna.2012.05.028

Cited by 28 publications

(14 citation statements)

References 16 publications

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“…If this angle can be aligned toward a vertical direction, then this actuator can generate outof-plane motion. There have been several designs to fabricate this out-of-plane bent beam through a step-bridge shape [19] or trench [22,23]. But, many of them still have their own limitations such as smaller motion range and more complex fabrication processes than in-plane actuators due to lack of appropriate MEMS fabrication technologies.…”

Section: Design Of the Motion Stagementioning

confidence: 99%

Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

Kim

Dagalakis

Gupta

2013

J. Micromech. Microeng.

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Realizing out-of-plane actuation in micro-electro-mechanical systems (MEMS) is still a challenging task. In this paper, the design, fabrication methods and experimental results for a MEMS-based out-of-plane motion stage are presented based on bulk micromachining technologies. This stage is electrothermally actuated for out-of-plane motion by incorporating beams with step features. The fabricated motion stage has demonstrated displacements of 85 μm with 0.4 μm (mA) −1 rates and generated up to 11.8 mN forces with stiffness of 138.8 N m −1. These properties obtained from the presented stage are comparable to those for in-plane motion stages, therefore making this out-of-plane stage useful when used in combination with in-plane motion stages.

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Section: Design Of the Motion Stagementioning

confidence: 99%

Creating large out-of-plane displacement electrothermal motion stage by incorporating beams with step features

Kim

Dagalakis

Gupta

2013

J. Micromech. Microeng.

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“…e thickness of the V-shaped beam b is not studied since it is irrelevant to the natural frequencies as demonstrated in (14) and (15). In the following discussions, we consider a single pair of beam with a shuttle for illustration, and similar conclusions can be extended to the cases of multipairs of beam and beam without a shuttle.…”

Section: Structural Parametersmentioning

confidence: 99%

“…Compared to other types of actuation mechanisms such as electrostatic [8], electromagnetic [9], and piezoelectric [10], electrothermal microactuators work on the thermal expansions of beam structures and have been demonstrated to be compact, stable, and large displacement and force techniques [11,12]. Various electrothermal actuators have been demonstrated up to date in achieving inplane [11,13] and out-of-plane [14][15][16] motion.…”

Section: Introductionmentioning

confidence: 99%

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Zhang

2018

Shock and Vibration

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Comprehensive analysis on the modal characteristics of V-shaped electrothermal microactuators is presented in this paper for the first time. Considering the unique geometric characteristics of the V-shaped beam, that is, two inclined beams supporting a movable shuttle, both the lateral and longitudinal deflections are taken into account in the modal analysis. Boundary and continuity conditions are employed to obtain the frequency equation. Natural frequencies are then obtained by solving the frequency equation. Mode shapes corresponding to their natural frequencies are also calculated analytically. e theoretical modal analysis is verified with the finite element analysis using ANSYS software. Based on the model analysis, this paper further investigates the relationship between natural frequencies and the volume scaling of the V-shaped beam. Finally, comprehensive parametric studies in terms of material properties and structural dimensions are conducted to provide insights and guidance in designing the V-shaped beam electrothermal microactuators.

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“…For this purpose we performed electro-thermomechanical simulations in order to obtain the temperature and displacement values during the actuation (FIGURES [3][4][5]. The boundary conditions of the simulations used for experimental thermal actuator were the following: the initial temperature of the whole structure and the temperature of the environment were considered to be T 0 =20 o C and the air convection coefficient was set to 20 W/m 2 K. The material properties settings for the Aluminum were assumed to be: the Young's modulus of 77 GPa, the Poisson's ratio of 0.3, the thermal coefficient of expansion of 2.3×10 -5 K -1 and the thermal conductivity depends on the temperature values [16].…”

Section: Figure 2 the Effects Of The Thermal Expansionmentioning

confidence: 99%

“…Magnetic actuation uses Lorentz Force Equation or the theory of magnetism to convert an electrical signal (current) into a mechanical output (displacement). This kind of actuators requires special conditions for fabrication [4][5][6][7][8]. Piezoelectric actuators have the capability to convert an electrical energy into mechanical energy or vice versa and they don't have moving parts like thermal or other types of actuators.…”

Section: Introductionmentioning

confidence: 99%