Design and calibration of a six-axis MEMS sensor array for use in scoliosis correction surgery

Benfield, David; Yue, Shichao; Lou, Edmond; Moussa, Walied A.

doi:10.1088/0960-1317/24/8/085008

Cited by 12 publications

(4 citation statements)

References 32 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…MEMS and NEMS hinged micro-mechanisms are nowadays employed in several applications as, for example, in biology [1,2], surgery [3,4], aerospace [5,6] and micro assembly [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Operational characterization of CSFH MEMS technology based hinges

Crescenzi

Balucani

Belfiore

2018

J. Micromech. Microeng.

View full text Add to dashboard Cite

Progress in MEMS technology continuously stimulates new developments in the mechanical structure of micro systems, such as, for example, the concept of so-called CSFH (conjugate surfaces flexural hinge), which makes it possible, simultaneously, to minimize the internal stresses and to increase motion range and robustness. Such a hinge may be actuated by means of a rotary comb-drive, provided that a proper set of simulations and tests are capable to assess its feasibility. In this paper, a CSFH has been analyzed with both theoretical and finite element (FEM) methods, in order to obtain the relation between voltage and generated torque. The FEM model considers also the fringe effect on the comb drive finger. Electromechanical couple–field analysis is performed by means of both direct and load transfer methods. Experimental tests have been also performed on a CSFH embedded in a MEMS prototype, which has been fabricated starting from a SOI wafer and using D–RIE (deep reactive ion etching). Results showed that CSFH performs better than linear flexure hinges in terms of larger rotations and less stress for given applied voltage.

show abstract

“…MEMS and NEMS hinged micro-mechanisms are nowadays employed in several applications as, for example, in biology [1,2], surgery [3,4], aerospace [5,6] and micro assembly [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Operational characterization of CSFH MEMS technology based hinges

Crescenzi

Balucani

Belfiore

2018

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…The resistance changes of the piezoresistors can be acquired for calculating the force asserted onto the sensor once the sensor is characterized with a known sensor. The characterization process has been elaborated in our previous work for a siliconbased force sensor [33]. The force calculation can be written in the form of equation 3:…”

Section: Sensing Mechanism Of the Multi-axis Force Sensormentioning

confidence: 99%

A Multiaxis Force Sensor Based on Pre-Strained Piezoresistive Film Strips

Yue,

Xu,

et al. 2023

IEEE Access

Self Cite

View full text Add to dashboard Cite

Soft multi-axis force sensors are essential in automation and robotic manipulations for dexterous applications. Carbon-based composites are quality candidates for sensing elements of soft multiaxis force sensors due to its piezoresistivity originated from electron tunneling effect. However, low cost and fast-prototyped soft multi-axis force sensors based on tunneling effect of carbon-based composites are still in their infant. This work investigated a soft multi-axis forces sensor utilizing Velostat film strips as the core sensing elements. A unique serpentine structure of Velostat strips has been designed and implemented as piezoresistors for the soft force sensor. The sensitivity of the proposed multi-axis force sensor has been characterized in x, y and z directions. Experimental results show that the sensor can achieve 2.1%/N and 2.2%/N in x and y axis, and 4.2%/N in z axis, respectively. The force sensor has been implemented in dexterous manipulations with a robotic gripper as the proof-of-concept, which demonstrates great potential for multi-axis force sensing applications.INDEX TERMS Velostat, multi-axis force sensor, piezoresistivity, robotic gripper.

show abstract

“…MEMS devices (Micro-electro-mechanical systems) represent a category of sensors and actuators widely used in the most varied fields of technology, from automotive to micro assembly for photonics and RF application, microphones, microfluidic device, gyroscopes, chemical sensors for microfluidics systems, lab-on-chip systems and complex actuation systems [1]. One of the most promising fields of application is undoubtedly the biomedical one, such as biology [2], [3] and microsurgery [4]- [6]. Microgrippers are a particular class of MEMS devices, able to handle objects, including cells and molecules that have micrometric dimensions.…”

Section: Introductionmentioning

confidence: 99%

Comparative evaluation of three image analysis methods for angular displacement measurement in a MEMS microgripper prototype: a preliminary study

Vurchio¹,

Fiori²,

Scorza³

et al. 2021

ACTA IMEKO

View full text Add to dashboard Cite

The functional characterization of MEMS devices is relevant today since it aims at verifying the behavior of these devices, as well as improving their design. In this regard, this study focused on the functional characterization of a MEMS microgripper prototype suitable in biomedical applications: the measurement of the angular displacement of the microgripper comb-drive is carried out by means of two novel automatic procedures, based on an image analysis method, SURF-based (Angular Displacement Measurement based on Speeded Up Robust Features, ADMSURF) and FFT-based (Angular Displacement Measurement based on Fast Fourier Transform, ADMFFT) method, respectively. Moreover, the measurement results are compared with a Semi-Automatic Method (SAM), to evaluate which of them is the most suitable for the functional characterization of the device. The curve fitting of the outcomes from SAM and ADMSURF, showed a quadratic trend in agreement with the analytical model. Moreover, the ADMSURF measurements below 1° are affected by an uncertainty of about 0.08° for voltages less than 14 V, confirming its suitability for microgripper characterization. It was also evaluated that the ADMFFT is more suitable for measurement of rotations greater than 1° (up to 30°), with a measurement uncertainty of 0.02°, at 95% of confidence level.

show abstract

Design and calibration of a six-axis MEMS sensor array for use in scoliosis correction surgery

Cited by 12 publications

References 32 publications

Operational characterization of CSFH MEMS technology based hinges

Operational characterization of CSFH MEMS technology based hinges

A Multiaxis Force Sensor Based on Pre-Strained Piezoresistive Film Strips

Comparative evaluation of three image analysis methods for angular displacement measurement in a MEMS microgripper prototype: a preliminary study

Contact Info

Product

Resources

About