Design and Analysis of Planar and Lattice-Electrostatic Comb Drive Actuators

Kuendiger, T.; Howard, G.M.; Mokrian, P.; Ahmadi, M.; Miller, William C.

doi:10.1109/newcas.2005.1496723

Cited by 6 publications

(3 citation statements)

References 3 publications

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“…1, the driving force is attained by means of fringe fields from the comb fingers. Although the total capacitance increases linearly with displacement, the lateral capacitance that gets formed where the static and movable fingers overlap has a minimum contribution to the actuating force [10]. In such case, the fringe electric fields are assumed to be constant considering that the comb fingers are very large with respect to their displacement.…”

Section: Analysis and Modelingmentioning

confidence: 99%

Design and fabrication of a novel microgripper based on electrostatic actuation

Varona

Saenz

Fiscal-Woodhouse³

et al. 2009

2009 52nd IEEE International Midwest Symposium on Circuits and Systems

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Section: Analysis and Modelingmentioning

confidence: 99%

Design and fabrication of a novel microgripper based on electrostatic actuation

Varona

Saenz

Fiscal-Woodhouse³

et al. 2009

2009 52nd IEEE International Midwest Symposium on Circuits and Systems

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“…4. The capacitance can be calculated using the methods similar to those for MEMs comb drives [7]. The capacitor has a very high Q value when compared to the traditionally implemented varactor diodes.…”

Section: B Implementation Detailsmentioning

confidence: 99%

A novel digitally controlled low noise ring oscillator

Kuendiger

Chen

MacEachern

et al. 2008

2008 IEEE International Symposium on Circuits and Systems (ISCAS)

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This paper presents a digitally controlled oscillator (DCO) with a novel architecture. The proposed DCO achieves low noise operation without the need for an LC resonator or specialized radio frequency (RF) process layers. Frequency tuning is achieved by controlling capacitive coupled charge injection. The design is easily integrated with digital CMOS circuits and has the flexibility to be scaled to other processes or tuned for specific applications. A proof of concept circuit has been implemented on a 0.13 μm CMOS process. The tuning range is from 820 M Hz to 1.09 GH z. The phase noise at 1 GH z with an offset frequency of 100 KHz is −92.8 dBc/H z. The worst case cycle-to-cycle jitter is less than 1.28% with an RMS jitter of 1.7423 ps. Total power consumption is 6.12 mW .

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“…When the y-direction displacement is skewed too far to either side the structure may collapse. The maximum potential difference which may be applied for out of balance forces is given by [9]:…”

Section: Analysis and Design Of The Comb Drivementioning

confidence: 99%

A programmable mask for direct write lithography.

Pharas¹

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Design and Analysis of Planar and Lattice-Electrostatic Comb Drive Actuators

Cited by 6 publications

References 3 publications

Design and fabrication of a novel microgripper based on electrostatic actuation

Design and fabrication of a novel microgripper based on electrostatic actuation

A novel digitally controlled low noise ring oscillator

A programmable mask for direct write lithography.

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