2016 International Conference on Intelligent Systems Engineering (ICISE) 2016
DOI: 10.1109/intelse.2016.7475116
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Design and analysis of capacitance based Bio-MEMS cantilever sensor for tuberculosis detection

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Cited by 18 publications
(7 citation statements)
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“…The surface force range for binding of antigen antibody are 10N to 100N and the intermolecular force produced by binding of single antigen antibody is 10N (17). Thus interactions of 10 antigen antibody are measured and force of intermolecular is consider and is applied on the cantilever surface and its deformation value is demonstrated.…”
Section: Micro Cantilever Biosensormentioning
confidence: 99%
“…The surface force range for binding of antigen antibody are 10N to 100N and the intermolecular force produced by binding of single antigen antibody is 10N (17). Thus interactions of 10 antigen antibody are measured and force of intermolecular is consider and is applied on the cantilever surface and its deformation value is demonstrated.…”
Section: Micro Cantilever Biosensormentioning
confidence: 99%
“…Therefore, the design of biosensors requires a wide range of scientific and technical knowledge such as biochemistry, solid-state physics, surface chemistry, electrical engineering, etc . Recently, advances in micromachining and nanotechnology have made it possible to integrate the biosensing film, transducer, and partial readout system into a single device, enabling the fabrication of small and low-cost micro/nanoelectromechanical system (MEMS/NEMS) biosensors for continuous and in situ monitoring of the analyte of interest, even at trace levels. , The transducer of MEMS/NEMS biosensors is commonly a movable mechanical part such as a cantilever, a double-sided fixed beam, or a membrane that is deflected upon the occurrence of a recognition event at the biosensing film . The sensing mechanism of such movable transducers works in two different modes including static and dynamic modes.…”
Section: Introductionmentioning
confidence: 99%
“…Rapid advancement in MEMS technology has led to the development of various BioMEMS sensors for detection and diagnosis of a plethora of diseases for healthcare at a faster rate with improved sensitivity and accuracy which is very much required at the present situation of COVID-19 pandemic [1][2][3]. Among the most popular types of such miniaturized sensors, suspended polymeric microstructures such as microcantilevers and microbeams have several advantages including low cost, low analyte requirement, high sensitivity and faster response times compared to others [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…Among the most popular types of such miniaturized sensors, suspended polymeric microstructures such as microcantilevers and microbeams have several advantages including low cost, low analyte requirement, high sensitivity and faster response times compared to others [4][5][6]. Development of these sensors have been explored significantly since they have simple mechanical behavior which translates mechanical forces into displacement that have successfully detected various analyte species like, enzymes, antigens, antibodies, and biochemical substances through gravimetric analysis [3,4,7,8]. Further, the target analytes can be easily detected using various mechanisms like optical deflection, capacitance change, piezoresistive change, resonance frequency shift etc [7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%