Abstract:Suspended polymeric microstructures in the form of microcantilevers and microbeams have seen enormous flux of usage in physical, chemical and biological sensing. Present work investigates more about miniaturized PDMS elastomeric microbeams which can overcome the drawback of conventional rigid silicon based micro-sensors. Static and dynamic methods of analysis for the as-fabricated structures in the lab have been investigated in the present study using COMSOL Multiphysics® 5.3 software to give a better insight … Show more
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