2007
DOI: 10.1366/000370207779947477
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Depth Profiling by Confocal Raman Microspectroscopy: Semi-Empirical Modeling of the Raman Response

Abstract: It has been well documented that the use of dry optics in depth profiling by confocal Raman microspectroscopy significantly distorts the laser focal volume, thus negatively affecting the spatial resolution of the measurements. In that case, the resulting in-depth confocal profile is an outcome of several contributions: the broadening of the laser spot due to instrumental factors and diffraction, the spreading of the illuminated region due to refraction of the laser beam at the sample surface, and the influence… Show more

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Cited by 38 publications
(49 citation statements)
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“…This has been shown to be very successful in some circumstances, allowing accurate prediction of intensity-depth profiles for multilayer systems. 16,21 The overall conclusions that can be drawn from these studies are (a) the depth scale is significantly compressed (with at least two groups agreeing on a factor of~1.7 for NA = 0.9 and n = 1.5 21,23 ) and (b) the confocal aperture restricts the depth of field so that the resolution is better than predicted in our original treatment. Unfortunately, the resolution is still significantly worse than would be deduced from confocal…”
Section: Modeling the Confocal Responsementioning
confidence: 70%
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“…This has been shown to be very successful in some circumstances, allowing accurate prediction of intensity-depth profiles for multilayer systems. 16,21 The overall conclusions that can be drawn from these studies are (a) the depth scale is significantly compressed (with at least two groups agreeing on a factor of~1.7 for NA = 0.9 and n = 1.5 21,23 ) and (b) the confocal aperture restricts the depth of field so that the resolution is better than predicted in our original treatment. Unfortunately, the resolution is still significantly worse than would be deduced from confocal…”
Section: Modeling the Confocal Responsementioning
confidence: 70%
“…Unfortunately, as has been pointed out, 16,21 the Batchelder model greatly overestimates the fall in Raman intensity as a function of depth; consequently it does not accurately predict experimental depth profiles. Several workers have incorporated the effects of diffraction in a semi-empirical manner, 16,21,22 but the most rigorous theoretical treatment to date was by Sourisseau et al, who modeled axial and lateral diffraction and refraction as well as the effect of the confocal aperture. 23 They showed that diffraction is very important, introducing complex intensity variations both along and perpendicular to the zaxis (Fig.…”
Section: Modeling the Confocal Responsementioning
confidence: 99%
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“…This model has then been refined by others, in order to reproduce experimental values and, more particularly, the gradual decreasing of the back-scattered Raman signal due to the progressive widening of the confocal volume with depth [63,65,68,69,73]. However, as far as the quantitative detection of sorbed water is concerned, the decreasing of the Raman intensity with depth can be assumed to be corrected by previous steps of the data treatment, namely by the normalization of the water signal by Raman bands from the polymer (Section 2.2).…”
Section: Spherical Aberrations Affecting Resolution and Depth-scalementioning
confidence: 99%
“…45 This, however, does not take into account the diffraction and the effect of the confocal aperture, which has been calculated by various authors to different levels. 41,42,46,47 The work of Sourisseau and Maraval, 48 generally thought to be the most complete model, reduces the compression to ×1.7. In general, it has usually been found to be between ×1.5 and ×2.…”
Section: Depth Resolutionmentioning
confidence: 99%